(19)
(11) EP 3 127 158 A1

(12)

(43) Date of publication:
08.02.2017 Bulletin 2017/06

(21) Application number: 15772419.6

(22) Date of filing: 03.04.2015
(51) International Patent Classification (IPC): 
H01L 27/14(2006.01)
(86) International application number:
PCT/US2015/024194
(87) International publication number:
WO 2015/153938 (08.10.2015 Gazette 2015/40)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA

(30) Priority: 04.04.2014 US 201461975175 P

(71) Applicant: Robert Bosch GmbH
70442 Stuttgart (DE)

(72) Inventors:
  • FEYH, Ando, Lars
    72760 Reutlingen (DE)
  • O'BRIEN, Gary
    Palo Alto, CA 94304 (US)

   


(54) MEMBRANE-BASED SENSOR AND METHOD FOR ROBUST MANUFACTURE OF A MEMBRANE-BASED SENSOR