(19)

(11)

EP 3 131 757 A1

(12)

(43) Date of publication: 22.02.2017 Bulletin 2017/08 (21) Application number: 14718419.6 (22) Date of filing: 17.04.2014

(51) International Patent Classification (IPC):  B41F 15/42(2006.01) H01L 31/00(2006.01) B41F 15/46(2006.01) H05K 3/12(2006.01) (86) International application number: PCT/EP2014/057935 (87) International publication number: WO 2015/158392 (22.10.2015 Gazette 2015/42)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (71) Applicant: Applied Materials Italia Srl 31048 San Biagio di Callalta (TV) (IT)	(72) Inventor: VERCESI, Tommaso 63739 Aschaffenburg (DE) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Josephspitalstr. 15 80331 München 80331 München (DE)