PHOTOLITHOGRAPHY APPARATUS COMPRISING PROJECTION SYSTEM FOR CONTROL OF IMAGE SIZE - Patent 3134772

(19)

(11)

EP 3 134 772 A1

(12)

(43)	Date of publication:
	01.03.2017 Bulletin 2017/09

(21)	Application number: 15716849.3

(22)	Date of filing: 22.04.2015

(51)

International Patent Classification (IPC):

G03F 7/20^(2006.01)

G02B 15/14^(2006.01)

(86)	International application number:
	PCT/EP2015/058641

(87)	International publication number:
	WO 2015/162147 (29.10.2015 Gazette 2015/43)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
	Designated Extension States:
	BA ME
	Designated Validation States:
	MA

(30)

Priority:

23.04.2014 EP 14165611

(71)	Applicant: Liteq B.V.
	5674 CC Nuenen (NL)

(72)	Inventor:
	DILWORTH, Donald Charles 5674 CC Nuenen (NL)

(74)	Representative: V.O.
	P.O. Box 87930 Carnegieplein 5 2508 DH Den Haag 2508 DH Den Haag (NL)

(54)	PHOTOLITHOGRAPHY APPARATUS COMPRISING PROJECTION SYSTEM FOR CONTROL OF IMAGE SIZE