(19)

(11)

EP 3 167 489 A1

(12)

(43) Date of publication: 17.05.2017 Bulletin 2017/20 (21) Application number: 16763062.3 (22) Date of filing: 09.09.2016

(51) International Patent Classification (IPC):  H01L 29/744(2006.01) H01L 29/10(2006.01) H01L 29/66(2006.01) H01L 29/08(2006.01) H01L 29/36(2006.01) H01L 29/06(2006.01) (86) International application number: PCT/EP2016/071353 (87) International publication number: WO 2017/042363 (16.03.2017 Gazette 2017/11)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 11.09.2015 EP 15184822 (71) Applicant: ABB Schweiz AG 5400 Baden (CH)	(72) Inventors: ARNOLD, Martin 5400 Baden (CH) VEMULAPATI, Umamaheswara 5430 Wettingen (CH) (74) Representative: ABB Patent Attorneys  c/o ABB Schweiz AG Intellectual Property CH-IP Brown Boveri Strasse 6 5400 Baden 5400 Baden (CH)