(19)

(11)

EP 3 175 476 A1

(12)

(43) Date of publication: 07.06.2017 Bulletin 2017/23 (21) Application number: 15745481.0 (22) Date of filing: 31.07.2015

(51) International Patent Classification (IPC):  H01L 21/67(2006.01) C23C 14/22(2006.01) F27D 1/00(2006.01) (86) International application number: PCT/EP2015/067757 (87) International publication number: WO 2016/016465 (04.02.2016 Gazette 2016/05)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA (30) Priority: 31.07.2014 US 201462031768 P (71) Applicant: Katholieke Universiteit Leuven 3000 Leuven (BE)	(72) Inventors: LOCQUET, Jean-Pierre B-3053 Haasrode (BE) SU, Chen-Yi Taoyuan City 320 (TW) (74) Representative: DenK iP  Hundelgemsesteenweg 1116 9820 Merelbeke 9820 Merelbeke (BE)