(19)
(11) EP 3 178 107 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
01.01.2025 Bulletin 2025/01

(45) Mention of the grant of the patent:
27.11.2024 Bulletin 2024/48

(21) Application number: 15738399.3

(22) Date of filing: 22.07.2015
(51) International Patent Classification (IPC): 
H01L 21/20(2006.01)
(52) Cooperative Patent Classification (CPC):
H01L 21/02381; H01L 21/02458; H01L 21/02505; H01L 21/0254; H01L 21/0262
(86) International application number:
PCT/EP2015/066785
(87) International publication number:
WO 2016/020196 (11.02.2016 Gazette 2016/06)

(54)

SEMICONDUCTOR STRUCTURE COMPRISING AN ACTIVE SEMICONDUCTOR LAYER OF THE III-V TYPE ON A BUFFER LAYER STACK AND METHOD FOR PRODUCING SEMICONDUCTOR STRUCTURE

HALBLEITERSTRUKTUR MIT EINER AKTIVEN HALBLEITERSCHICHT DER III-V-ART AUF EINEM PUFFERSCHICHTSTAPEL UND VERFAHREN ZUR HERSTELLUNG EINER HALBLEITERSTRUKTUR

STRUCTURE DE SEMI-CONDUCTEUR COMPRENANT UNE COUCHE SEMI-CONDUCTRICE ACTIVE DU TYPE III-V ET PROCÉDÉ DE FABRICATION DE LADITE STRUCTURE

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 04.08.2014 EP 14179690

(43) Date of publication of application:
14.06.2017 Bulletin 2017/24

(73) Proprietor: Soitec Belgium NV
3500 Hasselt (BE)

(72) Inventors:
  • DERLUYN, Joff
    3051 Sint-Joris-Weert (BE)
  • DEGROOTE, Stefan
    3271 Scherpenheuvel-Zichem (BE)

(74) Representative: IP HILLS NV 
Bellevue 5/501
9050 Gent-Ledeberg
9050 Gent-Ledeberg (BE)


(56) References cited: : 
EP-A1- 2 565 907
EP-A2- 2 696 365
 EP-A2- 2 525 417
US-A1- 2008 217 645
   
  • TINGKAI LI ET AL: "Chapter 2: Challenge of III-V Materials Integration with Si Microtelectronics", 1 January 2011, III-V COMPOUND SEMICONDUCTORS: INTEGRATION WITH SILICON-BASED MICROELECTRONICS,, PAGE(S) 51 - 96, XP009189029
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).