(19)
(11) EP 3 183 091 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
05.09.2018 Bulletin 2018/36

(45) Mention of the grant of the patent:
16.05.2018 Bulletin 2018/20

(21) Application number: 15760269.9

(22) Date of filing: 29.07.2015
(51) International Patent Classification (IPC): 
B23K 26/00(2014.01)
B23K 26/0622(2014.01)
B23K 103/00(2006.01)
B23K 103/16(2006.01)
B23K 26/142(2014.01)
H01L 33/00(2010.01)
B23K 101/42(2006.01)
B23K 101/40(2006.01)
(86) International application number:
PCT/IB2015/055712
(87) International publication number:
WO 2016/027186 (25.02.2016 Gazette 2016/08)

(54)

SAPPHIRE COLLECTOR FOR REDUCING MECHANICAL DAMAGE DURING DIE LEVEL LASER LIFT-OFF

SAPHIREINSAMMELVORRICHTUNG ZUR REDUZIERUNG MECHANISCHER BESCHÄDIGUNGEN WÄHREND DES LASER LIFT-OFFS VON CHIPS

COLLECTEUR DE SAPHIR POUR REDUIRE L'ENDOMMAGEMENT MÉCANIQUE DURANT LIFT-OFF AU NIVEAU PUCE


(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 19.08.2014 US 201462038988 P

(43) Date of publication of application:
28.06.2017 Bulletin 2017/26

(73) Proprietor: Lumileds Holding B.V.
1118 BG Schiphol (NL)

(72) Inventors:
  • NIE, Dong
    NL-5656 AE Eindhoven (NL)
  • TEE, Kian-Hock
    NL-5656 AE Eindhoven (NL)

(74) Representative: ter Heegde, Paul Gerard Michel 
Lumileds Germany GmbH Philipsstraße 8
52068 Aachen
52068 Aachen (DE)


(56) References cited: : 
JP-A- 2012 121 073
KR-A- 20090 089 161
JP-A- 2014 124 648
   
  • M K Kelly ET AL: "Optical process for liftoo of Group III-nitride", , 28 November 1996 (1996-11-28), XP055221341, DOI: 10.1002/1521-396X(199701)159:13.0.CO;2-F Retrieved from the Internet: URL:http://onlinelibrary.wiley.com/doi/10. 1002/1521-396X%28199701%29159:1%3CR3::AID- PSSA99993%3E3.0.CO;2-F/abstract [retrieved on 2015-10-15]
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).