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EP 3 189 035 A1

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(43) Date of publication: 12.07.2017 Bulletin 2017/28 (21) Application number: 15837560.0 (22) Date of filing: 04.09.2015

(51) International Patent Classification (IPC):  C07D 209/86(2006.01) C07D 405/02(2006.01) C07D 409/02(2006.01) H01L 51/50(2006.01) C09K 11/06(2006.01) C07D 209/82(2006.01) C07D 405/04(2006.01) C07D 409/04(2006.01) H01L 51/54(2006.01) (86) International application number: PCT/KR2015/009376 (87) International publication number: WO 2016/036207 (10.03.2016 Gazette 2016/10)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA (30) Priority: 05.09.2014 KR 20140118870 (71) Applicant: Rohm And Haas Electronic Materials Korea Ltd. Chungcheongnam-do 331-980 (KR)

(72) Inventors: SHIM, Jae-Hoon Cheonan-si Chungcheongnam-do 331-980 (KR) PARK, Kyoung-Jin Cheonan-si Chungcheongnam-do 331-980 (KR) LEE, Tae-Jin Seongnam-si Gyeonggi-do 462-827 (KR) AHN, Hee-Choon Suwon-si Gyeonggi-do 443-400 (KR) MOON, Doo-Hyeon Hwaseong-si Gyeonggi-do 445-768 (KR) JUN, Ji-Song Cheonan-si Chungcheongnam-do 331-980 (KR) HONG, Jin-Ri Cheonan-si Chungcheongnam-do 331-980 (KR) DOH, Yoo-Jin Gwacheon-si Gyeonggi-do 427-731 (KR) (74) Representative: Houghton, Mark Phillip  Patent Outsourcing Limited 1 King Street Bakewell, Derbyshire DE45 1DZ Bakewell, Derbyshire DE45 1DZ (GB)