(19)
(11) EP 3 189 537 A1

(12)

(43) Date of publication:
12.07.2017 Bulletin 2017/28

(21) Application number: 15790301.4

(22) Date of filing: 04.09.2015
(51) International Patent Classification (IPC): 
H01J 37/28(2006.01)
H01J 37/22(2006.01)
(86) International application number:
PCT/NL2015/050616
(87) International publication number:
WO 2016/036250 (10.03.2016 Gazette 2016/10)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA

(30) Priority: 05.09.2014 NL 2013432

(71) Applicant: Delmic B.V.
2629 JA Delft (NL)

(72) Inventors:
  • EFFTING, Andries Pieter Johan
    NL-2518 HL Den Haag (NL)
  • DE PINTH, Wilhelmus Johannes Adriaan
    NL-5172 DN Kaatsheuvel (NL)
  • DE SWART, Gijsbert
    NL-5646 HE Eindhoven (NL)

(74) Representative: Peters, Sebastian Martinus 
Octrooibureau Vriesendorp & Gaade B.V. Koninginnegracht 19
2514 AB Den Haag
2514 AB Den Haag (NL)

   


(54) COMPACT INSPECTION APPARATUS COMPRISING A SCANNING ELECTRON MICROSCOPE AND AN OPTICAL MICROSCOPE