(19)
(11) EP 3 203 297 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
21.04.2021 Bulletin 2021/16

(45) Mention of the grant of the patent:
10.03.2021 Bulletin 2021/10

(21) Application number: 15846689.6

(22) Date of filing: 29.09.2015
(51) International Patent Classification (IPC): 
G02B 26/08(2006.01)
G02B 26/10(2006.01)
H01L 41/113(2006.01)
H01L 41/04(2006.01)
 B81B 3/00(2006.01)
H01L 41/09(2006.01)
H01L 41/187(2006.01)
(86) International application number:
PCT/JP2015/077589
(87) International publication number:
WO 2016/052548 (07.04.2016 Gazette 2016/14)

(54)

MIRROR DRIVE DEVICE AND DRIVE METHOD THEREFOR

SPIEGELANTRIEBSVORRICHTUNG UND ANTRIEBSVERFAHREN DAFÜR

DISPOSITIF D'ENTRAÎNEMENT DE MIROIR ET PROCÉDÉ D'ENTRAÎNEMENT POUR CELUI-CI

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 30.09.2014 JP 2014201651

(43) Date of publication of application:
09.08.2017 Bulletin 2017/32

(73) Proprietor: FUJIFILM Corporation
Tokyo 106-8620 (JP)

(72) Inventor:
  • NAONO, Takayuki
    Ashigarakami-gun Kanagawa 258-8577 (JP)

(74) Representative: Klunker IP Patentanwälte PartG mbB 
Destouchesstraße 68
80796 München
80796 München (DE)


(56) References cited: : 
EP-A2- 1 857 855
JP-A- H11 112 048
JP-A- 2010 085 506
JP-A- 2012 208 352
 WO-A1-2012/014666
JP-A- 2005 128 147
JP-A- 2010 197 994
US-A1- 2010 195 180
   
  • HIROKAZU MATSUO ET AL: "Novel Design for Optical Scanner with Piezoelectric Film Deposited by Metal Organic Chemical Vapor Deposition", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 49, no. 4, 1 April 2010 (2010-04-01), page 04DL19, XP055396113, JP ISSN: 0021-4922, DOI: 10.1143/JJAP.49.04DL19
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).