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(11)

EP 3 213 598 A1

(12)

(43) Date of publication: 06.09.2017 Bulletin 2017/36 (21) Application number: 15795267.2 (22) Date of filing: 28.10.2015

(51) International Patent Classification (IPC):  H05B 1/02(2006.01) G01N 25/00(2006.01) H04N 5/33(2006.01) H05B 3/22(2006.01) H01L 21/67(2006.01) (86) International application number: PCT/US2015/057905 (87) International publication number: WO 2016/069808 (06.05.2016 Gazette 2016/18)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA (30) Priority: 31.10.2014 US 201414530670 (71) Applicant: Watlow Electric Manufacturing Company St. Louis, MO 63146 (US)	(72) Inventor: STEINHAUSER, Louis, P. St. Louis, MN 63129 (US) (74) Representative: Delorme, Nicolas et al Cabinet Germain & Maureau BP 6153 69466 Lyon Cedex 06 69466 Lyon Cedex 06 (FR)