(19)
(11) EP 3 218 934 A1

(12)

(43) Date of publication:
20.09.2017 Bulletin 2017/38

(21) Application number: 15858782.4

(22) Date of filing: 13.11.2015
(51) International Patent Classification (IPC): 
H01L 29/06(2006.01)
(86) International application number:
PCT/US2015/060753
(87) International publication number:
WO 2016/077804 (19.05.2016 Gazette 2016/20)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 13.11.2014 US 201462079356 P

(71) Applicant: Neem Scientific Inc.
San Diego, CA 92129-4667 (US)

(72) Inventor:
  • WANG, Deli
    San Diego, CA 92129-4667 (US)

(74) Representative: Engel, Christoph Klaus 
Engel Patentanwaltskanzlei Marktplatz 6
98527 Suhl/Thüringen
98527 Suhl/Thüringen (DE)

   


(54) LARGE SCALE, LOW COST NANOSENSOR, NANO-NEEDLE, AND NANOPUMP ARRAYS