(19)

(11)

EP 3 224 388 A1

(12)

(43) Date of publication: 04.10.2017 Bulletin 2017/40 (21) Application number: 15797992.3 (22) Date of filing: 17.11.2015

(51) International Patent Classification (IPC):  C23C 18/32(2006.01) C23C 18/50(2006.01) (86) International application number: PCT/EP2015/076822 (87) International publication number: WO 2016/083195 (02.06.2016 Gazette 2016/22)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 26.11.2014 EP 14194890 (71) Applicant: Atotech Deutschland GmbH 10553 Berlin (DE)	(72) Inventors: PICALEK, Jan 10553 Berlin (DE) BERA, Holger 10829 Berlin (DE) AKHTAR, Shakeel 10553 Berlin (DE) BEJAN, Iulia 10553 Berlin (DE) PINNAU, Jennifer 10553 Berlin (DE)