(19)
(11) EP 3 227 653 A1

(12)

(43) Date of publication:
11.10.2017 Bulletin 2017/41

(21) Application number: 14808977.4

(22) Date of filing: 04.12.2014
(51) International Patent Classification (IPC): 
G01L 9/00(2006.01)
G01L 13/02(2006.01)
(86) International application number:
PCT/EP2014/076630
(87) International publication number:
WO 2016/087000 (09.06.2016 Gazette 2016/23)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(71) Applicant: Memsens Sàrl
2000 Neuchâtel (CH)

(72) Inventor:
  • HU, Bo
    CH-2000 Neuchâtel (CH)

(74) Representative: Gevers SA 
Rue des Noyers 11
2000 Neuchâtel
2000 Neuchâtel (CH)

   


(54) SILICON CAPACITIVE DIFFERENTIAL PRESSURE SENSOR WITH HIGH OVERLOAD PROTECTION