| (84) |
Designated Contracting States: |
|
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
|
Designated Extension States: |
|
BA ME |
| (71) |
Applicants: |
|
- Applied Materials Switzerland Sàrl
1033 Cheseaux-sur-Lausanne (CH)
- Commissariat à l'Énergie Atomique
et aux Énergies Alternatives
75015 Paris (FR)
|
|
| (72) |
Inventors: |
|
- SEVERICO, Ferdinando
I-28010 Cavaglietto (IT)
- PENOT, Jean-Daniel
F-73000 Chambéry (FR)
- DARIDON, Antoine
CH-1185 Mont sur Rolle (CH)
- SILLARD, Léo
F-92240 Malakoff (FR)
- SPEYRER, John
CH-1029 Villars-Ste.-Croix (CH)
|
| (74) |
Representative: Zimmermann & Partner
Patentanwälte mbB |
|
Josephspitalstr. 15 80331 München 80331 München (DE) |
|