(84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA ME |
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Designated Validation States: |
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MA MD |
(30) |
Priority: |
19.01.2015 IT VI20150013
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(71) |
Applicant: Ebara Corporation |
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Ohta-ku, Tokyo 144-8510 (JP) |
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(72) |
Inventors: |
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- CIROLINI, Andrea
38023 Cles (Trento) (IT)
- MAULE, Mauro
38023 Cles (Trento) (IT)
- ARMIENTO, Marco
38023 Cles (Trento) (IT)
|
(74) |
Representative: Schmidbauer, Andreas Konrad |
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Wagner & Geyer Partnerschaft
Patent- und Rechtsanwälte
Gewürzmühlstrasse 5 80538 München 80538 München (DE) |
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