(19)

(11)

EP 3 254 303 A2

(12)

(88) Date of publication A3: 24.11.2016 (43) Date of publication: 13.12.2017 Bulletin 2017/50 (21) Application number: 16706464.1 (22) Date of filing: 04.02.2016

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) C23C 16/34(2006.01) C23C 16/56(2006.01) C23C 16/40(2006.01) C23C 16/36(2006.01) C23C 16/455(2006.01) (86) International application number: PCT/US2016/016514 (87) International publication number: WO 2016/126911 (11.08.2016 Gazette 2016/32)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 06.02.2015 US 201562113024 P 03.04.2015 US 201562142546 P (71) Applicant: Versum Materials US, LLC Tempe, AZ 85284 (US)

(72) Inventors: CHANDRA, Haripin San Marcos, CA 92078 (US) CUTHILL, Kirk, Scott Vista, CA 92084 (US) MALLIKARJUNAN, Anupama San Marcos, CA 92078 (US) LEI, Xinjian Vista, CA 92081 (US) MACDONALD, Matthew, R. Laguna Niguel, CA 92677 (US) XIAO, Manchao San Diego, CA 92130 (US) RAO, Madhukar, Bhaskara Carlsbad, CA 92008 (US) LI, Jianheng Emmaus, PA 18049 (US) (74) Representative: Beck Greener  Fulwood House 12 Fulwood Place London WC1V 6HR London WC1V 6HR (GB)