MICRO MECHANICAL DEVICES WITH AN IMPROVED RECESS OR CAVITY STRUCTURE - Patent 3256831

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EP 3 256 831 A1

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(43)	Date of publication:
	20.12.2017 Bulletin 2017/51

(21)	Application number: 15706350.4

(22)	Date of filing: 12.02.2015

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International Patent Classification (IPC):

G01L 9/00^(2006.01)

(86)	International application number:
	PCT/US2015/015542

(87)	International publication number:
	WO 2016/130123 (18.08.2016 Gazette 2016/33)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
	Designated Extension States:
	BA ME

(71)	Applicant: Honeywell International Inc.
	Morristown, NJ 07962-2245 (US)

(72)	Inventor:
	STEWART, Carl Morristown, New Jersey 07962-2245 (US)

(74)	Representative: Houghton, Mark Phillip
	Patent Outsourcing Limited 1 King Street Bakewell, Derbyshire DE45 1DZ Bakewell, Derbyshire DE45 1DZ (GB)

(54)	MICRO MECHANICAL DEVICES WITH AN IMPROVED RECESS OR CAVITY STRUCTURE