(19)
(11) EP 3 268 979 A1

(12)

(43) Date of publication:
17.01.2018 Bulletin 2018/03

(21) Application number: 16762718.1

(22) Date of filing: 13.04.2016
(51) International Patent Classification (IPC): 
H01J 49/00(2006.01)
G21K 5/10(2006.01)
 G01N 23/00(2006.01)
G21K 7/00(2006.01)
(86) International application number:
PCT/US2016/027267
(87) International publication number:
WO 2016/145458 (15.09.2016 Gazette 2016/37)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 10.03.2015 US 201562130819 P

(71) Applicants:
  • Hermes Microvision Inc.
    East Dist., Hsinchu City 300 (TW)
  • Ren, Weiming
    San Jose, CA 95133 (US)
  • Li, Shuai
    Beijing (CN)
  • Liu, Xuedong
    San Jose, CA 95129 (US)
  • Chen, Zhongwei
    San Jose, CA 95129 (US)

(72) Inventors:
  • REN, Weiming
    San Jose, CA 95133 (US)
  • LI, Shuai
    Beijing (CN)
  • LIU, Xuedong
    San Jose, CA 95129 (US)
  • CHEN, Zhongwei
    San Jose, CA 95129 (US)

(74) Representative: Peters, John Antoine 
ASML Netherlands BV Corporate Intellectual Property P.O. Box 324
5500 AH Veldhoven
5500 AH Veldhoven (NL)

   


(54) APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS