(19)
(11) EP 3 268 983 A1

(12)

(43) Date of publication:
17.01.2018 Bulletin 2018/03

(21) Application number: 16762122.6

(22) Date of filing: 25.02.2016
(51) International Patent Classification (IPC): 
H01L 21/302(2006.01)
(86) International application number:
PCT/US2016/019490
(87) International publication number:
WO 2016/144557 (15.09.2016 Gazette 2016/37)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 10.03.2015 US 201562130985 P

(71) Applicant: Honeywell International Inc.
Morris Plains, NJ 07950 (US)

(72) Inventors:
  • MITCHELL, Glenn M.
    Morris Plains, New Jersey 07950 (US)
  • SUNDARRAJ, Suresh
    Morris Plains, North Carolina 07950 (US)
  • MEYER, Wayne D.
    Morris Plains, New Jersey 07950 (US)
  • LI, Jianxing
    Morris Plains, New Jersey 07950 (US)
  • STEELE, David E.
    Morris Plains, New Jersey 07950 (US)
  • RUGGIERO, Marc D.
    Morris Plains, New Jersey 07950 (US)

(74) Representative: Crooks, Elizabeth Caroline 
Kilburn & Strode LLP Lacon London 84 Theobalds Road
London WC1X 8NL
London WC1X 8NL (GB)

   


(54) METHOD OF PURIFYING AND CASTING MATERIALS