| (84) |
Designated Contracting States: |
|
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
|
Designated Extension States: |
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BA ME |
|
Designated Validation States: |
|
MA MD |
| (30) |
Priority: |
20.03.2015 IT VI20150081
|
| (71) |
Applicant: Ebara Corporation |
|
Tokyo 144-8510 (JP) |
|
| (72) |
Inventors: |
|
- GROPPO, Renato
38023 Cles (Trento) (IT)
- BALBO, Fabio
38023 Cles (Trento) (IT)
- MATTEAZZI, Mariano
38023 Cles (Trento) (IT)
- OBUCHI, Masashi
Tokyo 144-8510 (JP)
- SAKIHAMA, Dai
Tokyo 144-8510 (JP)
- KUROIWA, So
Tokyo 144-8510 (JP)
|
| (74) |
Representative: Schmidbauer, Andreas Konrad |
|
Wagner & Geyer Partnerschaft
Patent- und Rechtsanwälte
Gewürzmühlstrasse 5
80538 München
80538 München (DE) |
|
