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EP 3 274 083 A1

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(43) Date of publication: 31.01.2018 Bulletin 2018/05 (21) Application number: 16711632.6 (22) Date of filing: 23.03.2016

(51) International Patent Classification (IPC):  B01J 13/02(2006.01) C23C 16/00(2006.01) G03F 7/00(2006.01) C23C 14/00(2006.01) B82Y 40/00(2011.01) B82Y 30/00(2011.01) (86) International application number: PCT/EP2016/056377 (87) International publication number: WO 2016/156148 (06.10.2016 Gazette 2016/40)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 27.03.2015 EP 15161329 (71) Applicant: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. 80539 München (DE)	(72) Inventors: JEONG, Hyeon-Ho 70563 Stuttgart (DE) LEE, Dr. Tung Chun Hong Kong (CN) FISCHER, Prof. Dr. Peer 79100 Freiburg (DE) (74) Representative: Manitz Finsterwald Patentanwälte PartmbB  Martin-Greif-Strasse 1 80336 München 80336 München (DE)