(19)

(11)

EP 3 283 667 A1

(12)

(43) Date of publication: 21.02.2018 Bulletin 2018/08 (21) Application number: 16722589.5 (22) Date of filing: 03.05.2016

(51) International Patent Classification (IPC):  C23C 28/00(2006.01) F01D 5/28(2006.01) (86) International application number: PCT/EP2016/059828 (87) International publication number: WO 2016/202495 (22.12.2016 Gazette 2016/51)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 19.06.2015 EP 15172884 (71) Applicant: Siemens Aktiengesellschaft 80333 München (DE)	(72) Inventors: FLORES RENTERIA, Arturo 12161 Berlin (DE) HITCHMAN, Neil Charlotte, NC 28277 (US) STAMM, Werner 45481 Mülheim an der Ruhr (DE) ZOIS, Dimitrios 10585 Berlin (DE)