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EP 3 286 604 A1

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(43) Date of publication: 28.02.2018 Bulletin 2018/09 (21) Application number: 16783618.8 (22) Date of filing: 14.04.2016

(51) International Patent Classification (IPC):  G03F 1/20(2012.01) G03F 1/70(2012.01) G03F 1/92(2012.01) H01L 21/027(2006.01) G03F 1/36(2012.01) G03F 1/76(2012.01) G03F 7/20(2006.01) (86) International application number: PCT/US2016/027408 (87) International publication number: WO 2016/171978 (27.10.2016 Gazette 2016/43)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 23.04.2015 US 201562151478 P (71) Applicant: Ocean Optics, Inc. Largo FL 33777 (US)	(72) Inventor: LANE, James D. Dunedin, Florida 34698 (US) (74) Representative: Spachmann, Holger  Stumpf Patentanwälte PartGmbB Alte Weinsteige 73 70597 Stuttgart 70597 Stuttgart (DE)