(19)

(11)

EP 3 295 474 A1

(12)

(43) Date of publication: 21.03.2018 Bulletin 2018/12 (21) Application number: 16803976.6 (22) Date of filing: 18.05.2016

(51) International Patent Classification (IPC):  H01L 21/20(2006.01) H01L 21/768(2006.01) (86) International application number: PCT/US2016/032969 (87) International publication number: WO 2016/196007 (08.12.2016 Gazette 2016/49)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 03.06.2015 US 201514729741 (71) Applicant: Veeco Instruments Inc. Plainview, NY 11803 (US)	(72) Inventors: SU, Jie Metuchen, New Jersey 08840 (US) PAPASOULIOTIS, George Warren, New Jersey 07059 (US) KRISHNAN, Balakrishnan Bridgewater, New Jersey 08807 (US) LEE, Soo Min Bridgewater, New Jersey 08807 (US) (74) Representative: Williams, David John  Page White & Farrer Bedford House John Street London WC1N 2BF London WC1N 2BF (GB)