| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
04.05.2015 US 201514703692
09.10.2015 US 201514879522
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| (43) |
Date of publication of application: |
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28.03.2018 Bulletin 2018/13 |
| (60) |
Divisional application: |
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21183872.7 |
| (73) |
Proprietor: SEMILAB Semiconductor Physics Laboratory Co., Ltd. |
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Budapest 1117 (HU) |
|
| (72) |
Inventors: |
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- KISS, Zoltan Tamas
1115 Budapest (HU)
- DUDAS, Laszlo
2119 Pécel (HU)
- KOVACS, Zsolt
1048 Budapest (HU)
- LAJTOS, Imre
1012 Budapest (HU)
- NADUDVARI, Gyorgy
2084 Pilisszentivan (HU)
- LAURENT, Nicolas
Singapore 557320 (SG)
- JASTRZEBSKI, Lubomir L.
Clearwater, Florida 33767 (US)
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| (74) |
Representative: Fish & Richardson P.C. |
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Highlight Business Towers
Mies-van-der-Rohe-Straße 8
80807 München
80807 München (DE) |
| (56) |
References cited: :
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EP-A1- 2 587 547
WO-A1-2010/058680
WO-A1-2011/079353
DE-A1-102010 029 133
KR-A- 20150 043 346
US-A1- 2007 008 518
US-A1- 2011 025 839
US-A1- 2012 111 396
US-A1- 2013 027 543
US-A1- 2013 129 189
US-A1- 2014 224 965
US-B1- 7 446 868
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EP-A1- 2 562 000
EP-A1- 2 650 674
WO-A1-2011/017772
WO-A1-2014/020046
DE-A1-102012 010 406
US-A1- 2007 000 434
US-A1- 2010 220 186
US-A1- 2011 292 376
US-A1- 2012 262 566
US-A1- 2013 062 536
US-A1- 2013 169 283
US-A1- 2015 008 952
US-B1- 8 023 110
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