METHODS AND APPARATUS FOR INSPECTING A SUBSTRATE FOR DEFECTS AND LOCATING SUCH DEFECTS IN THREE DIMENSIONS USING OPTICAL TECHNIQUES - Patent 3311145

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EP 3 311 145 A1

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(43)	Date of publication:
	25.04.2018 Bulletin 2018/17

(21)	Application number: 16732187.6

(22)	Date of filing: 16.06.2016

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International Patent Classification (IPC):

G01N 21/896^(2006.01)

(86)	International application number:
	PCT/US2016/037771

(87)	International publication number:
	WO 2016/205456 (22.12.2016 Gazette 2016/51)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
	Designated Extension States:
	BA ME
	Designated Validation States:
	MA MD

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Priority:

19.06.2015 US 201562181901 P

(71)	Applicant: Corning Incorporated
	Corning, New York 14831 (US)

(72)	Inventors:
	TOUSCHNER, Jeffrey Scott Elmira, New York 14905 (US) ZOELLER, Leon Robert, III Hammondsport, New York 14840 (US)

(74)	Representative: Olivier, Eleanor May
	Elkington and Fife LLP Prospect House 8 Pembroke Road Sevenoaks, Kent TN13 1XR Sevenoaks, Kent TN13 1XR (GB)

(54)	METHODS AND APPARATUS FOR INSPECTING A SUBSTRATE FOR DEFECTS AND LOCATING SUCH DEFECTS IN THREE DIMENSIONS USING OPTICAL TECHNIQUES