(19)
(11) EP 3 311 392 A1

(12)

(43) Date of publication:
25.04.2018 Bulletin 2018/17

(21) Application number: 16729551.8

(22) Date of filing: 14.06.2016
(51) International Patent Classification (IPC): 
H01L 21/02(2006.01)
H01L 21/82(2006.01)
 H01L 21/04(2006.01)
H01L 21/8252(2006.01)
(86) International application number:
PCT/EP2016/063608
(87) International publication number:
WO 2016/202787 (22.12.2016 Gazette 2016/51)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 16.06.2015 SE 1550820

(71) Applicant: Ascatron AB
164 40 Kista (SE)

(72) Inventors:
  • SCHÖNER, Adolf
    165 74 Hässelby (SE)
  • VIEIDER, Christian
    752 36 Uppsala (SE)
  • RESHANOV, Sergey
    194 67 Upplands Väsby (SE)
  • KAPLAN, Wlodzimierz
    191 45 Sollentuna (SE)

(74) Representative: Ström & Gulliksson AB 
Box 5275
102 46 Stockholm
102 46 Stockholm (SE)

   


(54) FILLING OF DEEP RECESSES