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(11)

EP 3 311 396 A1

(12)

(43) Date of publication: 25.04.2018 Bulletin 2018/17 (21) Application number: 16815048.0 (22) Date of filing: 10.06.2016

(51) International Patent Classification (IPC):  H01L 21/205(2006.01) H01L 21/677(2006.01) H01L 21/68(2006.01) H01L 21/02(2006.01) (86) International application number: PCT/US2016/037022 (87) International publication number: WO 2016/209647 (29.12.2016 Gazette 2016/52)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 22.06.2015 US 201562183166 P 14.10.2015 US 201562241482 P 23.02.2016 US 201662298540 P (71) Applicant: Veeco Instruments Inc. Plainview, NY 11803 (US)	(72) Inventors: KRISHNAN, Sandeep Jersey City, New Jersey 07302 (US) GURARY, Alexander Bridgewater, New Jersey 08807 (US) CHANG, Chenghung Paul Easton, Pennsylvania 18040 (US) MARCELO, Earl Franklin Park, New Jersey 08823 (US) (74) Representative: Noronha, Catherine  Dehns St Bride's House 10 Salisbury Square London EC4Y 8JD London EC4Y 8JD (GB)