(19)
(11) EP 3 311 486 A1

(12)

(43) Date of publication:
25.04.2018 Bulletin 2018/17

(21) Application number: 16734808.5

(22) Date of filing: 19.06.2016
(51) International Patent Classification (IPC): 
H03H 9/24(2006.01)
H03H 9/02(2006.01)
(86) International application number:
PCT/US2016/038275
(87) International publication number:
WO 2016/205770 (22.12.2016 Gazette 2016/51)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 19.06.2015 US 201562181767 P
23.06.2015 US 201562183689 P

(71) Applicant: SiTime Corporation
Santa Clara, CA 95051 (US)

(72) Inventors:
  • GROSJEAN, Charles, I.
    Santa Clara, CA 95051 (US)
  • MILLER, Nicholas
    Santa Clara, CA 95051 (US)
  • HAGELIN, Paul, M
    Santa Clara, CA 95051 (US)
  • HILL, Ginel, C.
    Santa Clara, CA 95051 (US)
  • DOLL, Joseph, C.
    Santa Clara, CA 95051 (US)
  • CHOKSHI, Trushal
    Santa Clara, CA 95051 (US)
  • ZHANG, Yi
    Santa Clara, CA 95051 (US)
  • PARTRIDGE, Aaron
    Santa Clara, CA 95051 (US)
  • LUTZ, Markus
    Santa Clara, CA 95051 (US)

(74) Representative: Eisenführ Speiser 
Patentanwälte Rechtsanwälte PartGmbB Johannes-Brahms-Platz 1
20355 Hamburg
20355 Hamburg (DE)

   


(54) MICROELECTROMECHANICAL RESONATOR