(19)
(11) EP 3 335 242 A1

(12)

(43) Date of publication:
20.06.2018 Bulletin 2018/25

(21) Application number: 16835909.9

(22) Date of filing: 11.08.2016
(51) International Patent Classification (IPC): 
H01L 29/66(2006.01)
H01L 29/15(2006.01)
H01L 27/14(2006.01)
(86) International application number:
PCT/US2016/046546
(87) International publication number:
WO 2017/027704 (16.02.2017 Gazette 2017/07)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 11.08.2015 US 201562203438 P
08.04.2016 US 201615094985

(71) Applicant: Cambridge Electronics, Inc.
Cambridge, MA 02142 (US)

(72) Inventors:
  • AZIZE, Mohamed
    Medford, MA 02155 (US)
  • LU, Bin
    Watertown, MA 02472 (US)
  • XIA, Ling
    Belmont, MA 02478 (US)

(74) Representative: FRKelly 
27 Clyde Road
Dublin D04 F838
Dublin D04 F838 (IE)

   


(54) SEMICONDUCTOR STRUCTURE WITH A SPACER LAYER