APPARATUS FOR PROCESSING OF A SUBSTRATE USED IN THE MANUFACTURE OF A SOLAR CELL, AND METHOD FOR PROCESSING OF A SUBSTRATE USED IN THE MANUFACTURE OF A SOLAR CELL - Patent 3335249

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EP 3 335 249 A1

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(43)	Date of publication:
	20.06.2018 Bulletin 2018/25

(21)	Application number: 16787898.2

(22)	Date of filing: 28.10.2016

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International Patent Classification (IPC):

H01L 31/18^(2006.01)

(86)	International application number:
	PCT/EP2016/076086

(87)	International publication number:
	WO 2018/077422 (03.05.2018 Gazette 2018/18)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
	Designated Extension States:
	BA ME
	Designated Validation States:
	MA MD

(71)	Applicant: APPLIED MATERIALS ITALIA S.R.L.
	31048 San Biagio di Callalta (TV) (IT)

(72)	Inventors:
	VOLTAN, Alessandro 31050 Morgano (TV) (IT) GALIAZZO, Marco 31055 Quinto di Treviso (TV) (IT) DE SANTI, Luigi 31027 Spresiano (TV) (IT)

(74)	Representative: Zimmermann & Partner Patentanwälte mbB
	Josephspitalstr. 15 80331 München 80331 München (DE)

(54)	APPARATUS FOR PROCESSING OF A SUBSTRATE USED IN THE MANUFACTURE OF A SOLAR CELL, AND METHOD FOR PROCESSING OF A SUBSTRATE USED IN THE MANUFACTURE OF A SOLAR CELL