(19)
(11) EP 3 341 959 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
08.06.2022 Bulletin 2022/23

(45) Mention of the grant of the patent:
27.04.2022 Bulletin 2022/17

(21) Application number: 16824976.1

(22) Date of filing: 11.07.2016
(51) International Patent Classification (IPC): 
H01L 21/677(2006.01)
B25J 9/12(2006.01)
H01L 21/67(2006.01)
 B25J 21/00(2006.01)
B25J 9/04(2006.01)
(52) Cooperative Patent Classification (CPC):
H01L 21/67742
(86) International application number:
PCT/US2016/041683
(87) International publication number:
WO 2017/011367 (19.01.2017 Gazette 2017/03)

(54)

SUBSTRATE TRANSPORT APPARATUS

SUBSTRATTRANSPORTVORRICHTUNG

APPAREIL DE TRANSPORT DE SUBSTRAT

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 13.07.2015 US 201562191836 P

(43) Date of publication of application:
04.07.2018 Bulletin 2018/27

(73) Proprietor: Brooks Automation US, LLC
Chelmsford, MA 01824 (US)

(72) Inventor:
  • CAVENEY, Robert, T.
    Windham, NH 03087 (US)

(74) Representative: Ipside 
7-9 Allées Haussmann
33300 Bordeaux Cedex
33300 Bordeaux Cedex (FR)


(56) References cited: : 
TW-B- I 470 723
US-A1- 2012 014 769
US-A1- 2013 028 700
US-A1- 2015 139 770
US-B2- 7 736 118
 US-A- 5 024 116
US-A1- 2012 128 450
US-A1- 2014 126 987
US-A1- 2015 206 782
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).