(19)
(11) EP 3 353 339 A1

(12)

(43) Date of publication:
01.08.2018 Bulletin 2018/31

(21) Application number: 16849805.3

(22) Date of filing: 23.09.2016
(51) International Patent Classification (IPC): 
C30B 25/00(2006.01)
C30B 25/18(2006.01)
C30B 25/02(2006.01)
C30B 25/20(2006.01)
(86) International application number:
PCT/US2016/053567
(87) International publication number:
WO 2017/053883 (30.03.2017 Gazette 2017/13)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 24.09.2015 US 201562232355 P

(71) Applicant: Melior Innovations Inc.
Houston, TX 77072 (US)

(72) Inventor:
  • LAND, Mark S.
    Houston, TX 77056 (US)

(74) Representative: Bungartz Christophersen Partnerschaft mbB Patentanwälte 
Im Mediapark 6A
50670 Köln
50670 Köln (DE)

   


(54) VAPOR DEPOSITION APPARATUS AND TECHNIQUES USING HIGH PURITY POLYMER DERIVED SILICON CARBIDE