A METHOD FOR TREATING SUBSTRATES WITH AN AQUEOUS LIQUID MEDIUM EXPOSED TO UV-RADIATION

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EP 3 353 605 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	01.03.2023 Bulletin 2023/09

(45)	Mention of the grant of the patent:
	18.05.2022 Bulletin 2022/20

(21)	Application number: 16769992.5

(22)	Date of filing: 20.09.2016

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International Patent Classification (IPC):

C11D 3/30^(2006.01)
G03F 7/42^(2006.01)
B08B 7/00^(2006.01)
G03F 1/82^(2012.01)
B05B 1/00^(2006.01)

C11D 11/00^(2006.01)
G03F 7/20^(2006.01)
B08B 3/10^(2006.01)
H01L 21/67^(2006.01)

(52)	Cooperative Patent Classification (CPC):
	B08B 3/10; B08B 7/0057; G03F 1/82; G03F 7/70925; H01L 21/67051; C11D 11/0047; G03F 7/42; G03F 7/423; G03F 7/425; H01L 21/31138; H01L 21/6708; H01L 21/67115; C11D 3/30; C11D 11/007; B05B 1/00

(86)	International application number:
	PCT/EP2016/072325

(87)	International publication number:
	WO 2017/050774 (30.03.2017 Gazette 2017/13)

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A METHOD FOR TREATING SUBSTRATES WITH AN AQUEOUS LIQUID MEDIUM EXPOSED TO UV-RADIATION

VERFAHREN ZUR BEHANDLUNG VON SUBSTRATEN MIT EINEM EINER UV-STRAHLUNG AUSGESETZTEN, WÄSSRIGEN FLÜSSIGMEDIUM

PROCÉDÉ PERMETTANT DE TRAITER DES SUBSTRATS À L'AIDE D'UN MILIEU LIQUIDE AQUEUX EXPOSÉ À UN RAYONNEMENT UV

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

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Priority:

24.09.2015 US 201514863523

(43)	Date of publication of application:
	01.08.2018 Bulletin 2018/31

(73)	Proprietor: Suss MicroTec Photomask Equipment GmbH & Co. KG
	75447 Sternenfels (DE)

(72)	Inventors:
	DATILO, Davide 75447 Sternenfels (DE) DIETZE, Uwe Austin, Texas 78734 (US) SINGH, SherJang Clifton Park, New York 12065 (US)

(74)	Representative: Carstens, Dirk Wilhelm
	Wagner & Geyer Partnerschaft mbB Patent- und Rechtsanwälte Gewürzmühlstraße 5 80538 München 80538 München (DE)

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References cited: :

EP-A2- 1 793 276
JP-A- 2004 241 726
US-A1- 2005 078 286

DE-A1-102009 058 962
US-A1- 2003 205 240

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).