ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIROMKCYALTRBGCZEEHUPLSK..HRIS..MTNORS..SM..................*JBDM Ver 2.0.16 (1th of February 2022) - 2999001/03353605CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120230301W173deBibliographieenBibliographyfrBibliographieEP16769992.5201609202018032320201203enenen20151486352320150924US2023030120230920180801201831202205182022202022010520220518LT20220818NO20220518ES20220518FI20220919PT20220518SE20220818BG20220518HR20220819GR20220518LV20220518RS20220518PL20220918IS20220518DK20220518CZ20220518RO20220518SK20220518SM20220518EE20230301202309C11D 3/30 20060101AFI20211112BHEP C11D 11/00 20060101ALI20211112BHEP G03F 7/42 20060101ALI20211112BHEP G03F 7/20 20060101ALI20211112BHEP B08B 7/00 20060101ALI20211112BHEP B08B 3/10 20060101ALI20211112BHEP G03F 1/82 20120101ALI20211112BHEP H01L 21/67 20060101ALI20211112BHEP B05B 1/00 20060101ALI20211112BHEP B08B 3/10 20130101 LI20161207BHEP B08B 7/0057 20130101 LI20161207BHEP G03F 1/82 20130101 LI20161207BHEP G03F 7/70925 20130101 LI20170406BHEP H01L 21/67051 20130101 LI20161207BHEP C11D 11/0047 20130101 LA20170530BHEP G03F 7/42 20130101 LI20171010BHEP G03F 7/423 20130101 LI20171010BHEP G03F 7/425 20130101 LI20171010BHEP H01L 21/31138 20130101 LA20171214BHEP H01L 21/6708 20130101 LI20170502BHEP H01L 21/67115 20130101 LI20170502BHEP C11D 3/30 20130101 LA20180706BHEP C11D 11/007 20130101 LI20180706BHEP B05B 1/00 20130101 FI20190615BHEP deVERFAHREN ZUR BEHANDLUNG VON SUBSTRATEN MIT EINEM EINER UV-STRAHLUNG AUSGESETZTEN, WÄSSRIGEN FLÜSSIGMEDIUMenA METHOD FOR TREATING SUBSTRATES WITH AN AQUEOUS LIQUID MEDIUM EXPOSED TO UV-RADIATIONfrPROCÉDÉ PERMETTANT DE TRAITER DES SUBSTRATS À L'AIDE D'UN MILIEU LIQUIDE AQUEUX EXPOSÉ À UN RAYONNEMENT UVEP-A2- 1 793 276DE-A1-102009 058 962JP-A- 2004 241 726US-A1- 2003 205 240US-A1- 2005 078 286DATILO, Davidec/o Süss Microtec Photomask Equipment GmbH & Co. KG Ferdinand-von-Steinbeis-Ring 1075447 SternenfelsDEDIETZE, Uwe105 Rupen CourtAustin, Texas 78734USSINGH, SherJang38 Longwood DriveClifton Park, New York 12065USSuss MicroTec Photomask Equipment GmbH & Co. KG101977502HAM-E-37624Ferdinand-von-Steinbeis-Ring 1075447 SternenfelsDECarstens, Dirk Wilhelm100774030Wagner & Geyer Partnerschaft mbB Patent- und Rechtsanwälte Gewürzmühlstraße 580538 MünchenDEALATBEBGCHCYCZDEDKEEESFIFRGBGRHRHUIEISITLILTLULVMCMKMTNLNOPLPTRORSSESISKSMTREP201607232520160920enWO201705077420170330201713