(19)
(11) EP 3 355 337 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
10.04.2024 Bulletin 2024/15

(45) Mention of the grant of the patent:
06.03.2024 Bulletin 2024/10

(21) Application number: 18153340.7

(22) Date of filing: 25.01.2018
(51) International Patent Classification (IPC): 
H01J 37/317(2006.01)
 H01J 37/302(2006.01)
(52) Cooperative Patent Classification (CPC):
H01J 37/3026; H01J 37/3177; H01J 2237/31764; H01J 2237/31766

(54)

ADVANCED DOSE-LEVEL QUANTIZATION FOR MULTIBEAM-WRITERS

ERWEITERTE QUANTISIERUNG AUF DOSISEBENE FÜR MEHRSTRAHLSCHREIBER

QUANTIFICATION DE DOSAGE AVANCÉE POUR DISPOSITIFS D'ÉCRITURE MULTI-FAISCEAUX

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 27.01.2017 EP 17153506

(43) Date of publication of application:
01.08.2018 Bulletin 2018/31

(73) Proprietor: IMS Nanofabrication GmbH
2345 Brunn am Gebirge (AT)

(72) Inventors:
  • Platzgummer, Elmar
    1090 Wien (AT)
  • Spengler, Christoph
    1150 Wien (AT)
  • Petsch, Hanns Peter
    1220 Wien (AT)

(74) Representative: Patentanwaltskanzlei Matschnig & Forsthuber OG 
Biberstraße 22 Postfach 36
1010 Wien
1010 Wien (AT)


(56) References cited: : 
US-A1- 2015 028 230
US-A1- 2016 013 019
US-A1- 2016 276 132
US-B2- 8 378 320
 US-A1- 2015 347 660
US-A1- 2016 071 684
US-A1- 2016 336 147
   
  • Anonymous: "Dither - Wikipedia", , 26 January 2017 (2017-01-26), XP055412751, Retrieved from the Internet: URL:https://en.wikipedia.org/w/index.php?t itle=Dither&oldid=762118152 [retrieved on 2017-10-05]
  • Anonymous: "Ordered dithering - Wikipedia", , 13 January 2017 (2017-01-13), XP055412752, Retrieved from the Internet: URL:https://en.wikipedia.org/w/index.php?t itle=Ordered_dithering&oldid=759840417 [retrieved on 2017-10-05]
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).