(19)

(11)

EP 3 359 501 A1

(12)

(43) Date of publication: 15.08.2018 Bulletin 2018/33 (21) Application number: 16854386.6 (22) Date of filing: 07.10.2016

(51) International Patent Classification (IPC):  C03C 17/10(2006.01) C03C 17/32(2006.01) H01L 31/0216(2014.01) C03C 17/25(2006.01) G02B 1/111(2015.01) (86) International application number: PCT/US2016/055898 (87) International publication number: WO 2017/062712 (13.04.2017 Gazette 2017/15)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 07.10.2015 US 201562238328 P (60) Divisional application: 18169666.7 (71) Applicant: Adaptive Surface Technologies, Inc. Cambridge, Massachusetts 02140 (US)	(72) Inventor: PHILSEOK, Kim Cambridge, Massachusetts 02140 (US) (74) Representative: Appleyard Lees IP LLP  15 Clare Road Halifax HX1 2HY Halifax HX1 2HY (GB)