(19)
(11) EP 3 365 403 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
13.07.2022 Bulletin 2022/28

(45) Mention of the grant of the patent:
05.01.2022 Bulletin 2022/01

(21) Application number: 16858053.8

(22) Date of filing: 18.10.2016
(51) International Patent Classification (IPC): 
C09G 1/02(2006.01)
C09G 1/14(2006.01)
 C09K 3/14(2006.01)
(52) Cooperative Patent Classification (CPC):
C09G 1/02; C23F 3/04; H01L 21/3212
(86) International application number:
PCT/US2016/057459
(87) International publication number:
WO 2017/070074 (27.04.2017 Gazette 2017/17)

(54)

COBALT INHIBITOR COMBINATION FOR IMPROVED DISHING

KOBALTINHIBITORKOMBINATION ZUR VERBESSERTEN BIEGEBILDUNG

COMBINAISON D'INHIBITEURS DE COBALT POUR UN BOMBAGE AMÉLIORÉ

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 21.10.2015 US 201514918756

(43) Date of publication of application:
29.08.2018 Bulletin 2018/35

(73) Proprietor: CMC Materials, Inc.
Aurora, IL 60504 (US)

(72) Inventors:
  • KRAFT, Steven
    Aurora, Illinois 60504 (US)
  • CARTER, Phillip W.
    Aurora, Illinois 60504 (US)
  • SEABOLD, Jason
    Aurora, Illinois 60504 (US)

(74) Representative: Barker Brettell LLP 
100 Hagley Road Edgbaston
Birmingham B16 8QQ
Birmingham B16 8QQ (GB)


(56) References cited: : 
WO-A1-2014/103494
US-A1- 2009 184 287
US-A1- 2013 186 850
 WO-A1-2015/108113
US-A1- 2010 193 728
US-A1- 2015 232 705
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).