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(11)

EP 3 365 909 A1

(12)

(43) Date of publication: 29.08.2018 Bulletin 2018/35 (21) Application number: 17756811.0 (22) Date of filing: 23.02.2017

(51) International Patent Classification (IPC):  H01J 23/00(2006.01) H01J 23/12(2006.01) H01J 23/033(2006.01) H01J 23/15(2006.01) (86) International application number: PCT/KR2017/001975 (87) International publication number: WO 2017/146473 (31.08.2017 Gazette 2017/35)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 23.02.2016 KR 20160021081 07.12.2016 KR 20160165753 (71) Applicant: Samsung Electronics Co., Ltd. Suwon-si, Gyeonggi-do 16677 (KR)	(72) Inventors: PARK, Dong Ho Suwon-si Gyeonggi-do 16548 (KR) KIM, Hak-Jae Suwon-si Gyeonggi-do 16691 (KR) KWON, Myoung Keun Seoul 03724 (KR) SEO, Eung Ryeol Suwon-si Gyeonggi-do 16701 (KR) YANG, Seung Chul Suwon-si Gyeonggi-do 16682 (KR) (74) Representative: Gulde & Partner  Patent- und Rechtsanwaltskanzlei mbB Wallstraße 58/59 10179 Berlin 10179 Berlin (DE)