(19)
(11) EP 3 368 703 A2

(12)

(88) Date of publication A3:
27.07.2017

(43) Date of publication:
05.09.2018 Bulletin 2018/36

(21) Application number: 16822767.6

(22) Date of filing: 28.11.2016
(51) International Patent Classification (IPC): 
C23C 14/34(2006.01)
C23C 14/02(2006.01)
G02B 1/00(2006.01)
H01J 37/34(2006.01)
 C23C 14/56(2006.01)
C23C 14/46(2006.01)
H01J 37/317(2006.01)
(86) International application number:
PCT/US2016/063819
(87) International publication number:
WO 2017/095731 (08.06.2017 Gazette 2017/23)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 02.12.2015 US 201562262191 P

(71) Applicant: SABIC Global Technologies B.V.
4612 PX Bergen op Zoom (NL)

(72) Inventors:
  • THAKORE, Ashir
    Novi, MI 48374 (US)
  • YAO, Huazhen
    Shanghai 201314 (CN)
  • LAI, Hengjie
    Shanghai 200120 (CN)
  • LIU, Chao
    Shanghai 201200 (CN)
  • NIU, Yaming
    Shanghai 200000 (CN)
  • JIANG, Siguang
    Shanghai 201300 (CN)

(74) Representative: Elzaburu S.L.P. 
Miguel Angel 21, 2nd floor
28010 Madrid
28010 Madrid (ES)

   


(54) APPLICATION OF MULTIPLE PLASMA COATING LAYERS IN A CONTINUOUS VACUUM