(19)

(11)

EP 3 371 654 A1

(12)

(43) Date of publication: 12.09.2018 Bulletin 2018/37 (21) Application number: 16753651.5 (22) Date of filing: 17.08.2016

(51) International Patent Classification (IPC):  G03F 7/20(2006.01) (86) International application number: PCT/EP2016/069528 (87) International publication number: WO 2017/076530 (11.05.2017 Gazette 2017/19)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 06.11.2015 EP 15193326 (71) Applicant: Paul Scherrer Institut 5232 Villigen PSI (CH)	(72) Inventors: CAMARDA, Massimo 5200 Brugg (CH) WÖRLE, Judith 5210 Windisch (CH) (74) Representative: Fischer, Michael  Siemens AG Postfach 22 16 34 80506 München 80506 München (DE)