BACKGROUND
1. Technical Field
[0001] The invention relates to technique for ejecting a liquid, such as ink.
2. Related Art
[0002] A liquid ejection head which ejects, from a nozzle, a liquid, such as ink supplied
to a plurality of pressure chambers from a liquid reservoir (a reservoir) by generating
pressure in each of the pressure chambers has been proposed. For example,
JP-A-2016-182811 discloses a technique for forming an opening on the same side as that of an inlet
of a liquid reservoir and sealing the opening with a flexible compliance substrate.
According to this configuration, pressure variation in the liquid reservoir caused
by a liquid introduced from the inlet of the liquid reservoir is accommodated by the
compliance substrate, and the influence of the pressure variation does not extend
as far as each pressure chamber.
SUMMARY
[0003] If pressure variation in the liquid reservoir is to be accommodated by a compliance
substrate as disclosed in
JP-A-2016-182811, the effect of accommodating the pressure variation in the liquid reservoir increases
as the area of an active part that is a portion of the compliance substrate to be
deformed increases. However, in the configuration of
JP-A-2016-182811, since the compliance substrate is disposed on the same side as that of the inlet,
an active part of the compliance substrate needs to be disposed so as not to interfere
with the inlet so that a metal part of the inlet is not deformed. Therefore, an area
and a form of the active part of the compliance substrate will be limited by the position
and the size of the inlet. An advantage of some aspects of the invention is to improve
the effect of accommodating the pressure variation caused by a liquid irrespective
of the position of the inlet.
[0004] A liquid ejection head of the invention includes a driving element that changes pressure
in a pressure chamber and causes a liquid to be ejected from a nozzle, an individual
channel that communicates with the pressure chamber, and a liquid reservoir that supplies
via the individual channel the liquid introduced from an inlet to the pressure chamber.
The liquid reservoir includes a first reservoir disposed on the inlet side, a second
reservoir disposed on the individual channel side, and an intermediate reservoir that
communicates with the first reservoir and the second reservoir. At least a part of
the first reservoir overlaps the second reservoir when seen in a plan view. A first
compliance substrate is provided in the first reservoir on the second reservoir side
on the side opposite to the inlet. A second compliance substrate is provided in the
second reservoir on the side opposite to the first reservoir. According to the above
aspect, since the first compliance substrate is provided in the first reservoir on
the inlet side on the side opposite to the second reservoir, an area of an active
part of the first compliance substrate can be increased irrespective of the position
and the size of the inlet as compared with a case in which the compliance substrate
is provided on the same side as that of the inlet. Thus, according to this aspect,
the effect of accommodating the pressure variation caused by a liquid can be improved
irrespective of the position of the inlet. Since the first compliance substrate is
provided in the first reservoir on the side opposite to the inlet, the first compliance
substrate can be disposed such that the liquid introduced from the inlet may hit the
first compliance substrate, therefore, pressure of the liquid is transmitted to the
first compliance substrate more easily than a case in which the first compliance substrate
is provided on the same side as that of the inlet. Therefore, pressure variation caused
by the liquid introduced from the inlet is easily accommodated by the first compliance
substrate. Since the second compliance substrate is provided in the second reservoir
disposed on the individual channel side on the side opposite to the first reservoir,
the second compliance substrate is disposed at a position closer to the pressure chamber
than the first compliance substrate. Therefore, pressure variation of the pressure
chamber transmitted to the second reservoir via the individual channel is effectively
accommodated by the second compliance substrate. Therefore, according to this aspect,
since pressure variation caused by the liquid can be effectively accommodated, ejection
stability of the liquid from the nozzle can be improved. Since at least a part of
the first reservoir overlaps the second reservoir when seen in a plan view, the size
of the liquid ejection head can be reduced.
[0005] In a desirable aspect of the invention, at least a part of the first compliance substrate
overlaps the second compliance substrate when seen in a plan view. According to this
aspect, since at least a part of the first compliance substrate overlaps the second
compliance substrate when seen in a plan view, the size of the liquid ejection head
can be reduced as compared with a case in which a part of the first compliance substrate
does not overlap the second compliance substrate.
[0006] In a desirable aspect of the invention, the Young's modulus of the second compliance
substrate is equal to or lower than the Young's modulus of the first compliance substrate.
According to this aspect, since the Young's modulus of the second compliance substrate
which better accommodates the pressure variation of the pressure chamber is set to
be equal to or lower than the Young's modulus of the first compliance substrate which
better accommodates the pressure variation caused by the introduction of a liquid
from the inlet, the second compliance substrate can be made softer than the first
compliance substrate. In this manner, the pressure variation of the pressure chamber
which is minuter (smaller) than the pressure variation caused by introduction of the
liquid from the inlet can be more easily accommodated by the second compliance substrate.
[0007] In a desirable aspect of the invention, a thickness of the second compliance substrate
is equal to or smaller than a thickness of the first compliance substrate. According
to this aspect, the second compliance substrate can be set to be softer than the first
compliance substrate by setting a thickness of the second compliance substrate to
be equal to or smaller than a thickness of the first compliance substrate. In this
manner, the pressure variation of the pressure chamber which is minuter than the pressure
variation caused by introduction of the liquid from the inlet can be more easily accommodated
by the second compliance substrate.
[0008] In a desirable aspect of the invention, the pressure chamber overlaps both the first
reservoir and the first compliance substrate when seen in a plan view. According to
this aspect, the size of the liquid ejection head can be reduced as compared with
a case in which the pressure chamber does not overlap both the first reservoir and
the first compliance substrate when seen in a plan view.
[0009] A desirable aspect of the invention includes a driving IC that drives the driving
element, and the driving IC overlaps both the pressure chamber and the first compliance
substrate when seen in a plan view. According to this aspect, the size of the liquid
ejection head can be reduced as compared with a case in which the driving IC does
not overlap both the pressure chamber and the first compliance substrate when seen
in a plan view.
[0010] A desirable aspect of the invention includes a case member in which the liquid reservoir
is formed. The case member includes a first case member in which the first reservoir
is formed, and a second case member in which the intermediate reservoir is formed.
The first case member and the second case member are stacked such that at least a
part of the first reservoir overlaps the second reservoir when seen in a plan view.
The first compliance substrate is provided between the first case member and the second
case member. According to this aspect, Since the first compliance substrate is provided
between the first case member and the second case member, the active part of the first
compliance substrate is not exposed to the outside of the first case member and the
second case member. Therefore, as compared with a case in which the first compliance
substrate is exposed to the outside of the first case member and the second case member,
evaporation of moisture content can be suppressed, and it is easy to take measures
to suppress evaporation of moisture content. In this aspect, the case member is divided
into the first case member and the second case member, and the first reservoir is
formed in the first case member. Therefore, by forming the first case member by a
material which is more easy to process than the second case member, the shape of a
ceiling of the first reservoir RB can be easily changed. Dischargeability of air bubbles
which easily move upward can be improved by forming the shape of a corner of the ceiling
of the first reservoir into a curved surface shape along a flow of the ink, and the
like, for example. Since a flow velocity of ink necessary for the discharge of air
bubbles can be lowered by improving dischargeability of air bubbles, waste of ink
can be reduced. Since the first case member and the second case member are divided,
a first reservoir of a different shape or a first reservoir having different functions,
for example, may be used easily by simply replacing the first case member.
[0011] In a desirable aspect of the invention, a damper chamber is provided in the second
case member on the side opposite to the first reservoir via the first compliance substrate.
According to this aspect, a damper chamber is provided in the second case member on
the side opposite to the first reservoir via the first compliance substrate. With
the pressure in the direction in which the liquid flows into the first reservoir from
the inlet, the first compliance substrate can be bent toward the damper chamber. Therefore,
the pressure variation of the liquid which flows into the first reservoir from the
inlet can be controlled effectively.
[0012] In a desirable aspect of the invention, the length of an active part of the first
compliance substrate which is to be deformed is longer than an opening width of the
inlet. According to this aspect, since the length of the active part of the first
compliance substrate is longer than the opening width of the inlet, the area of the
active part becomes larger than the opening width of the inlet, and deformation of
the active part can be made larger. Therefore, pressure variation of the ink is more
easily accommodated by the first compliance substrate.
[0013] In a desirable aspect of the invention, the first compliance substrate overlaps the
inlet when seen in a plan view. According to this aspect, since the first compliance
substrate overlaps the inlet when seen in a plan view, the ink introduced from the
inlet easily hits the first compliance substrate. Therefore, pressure of the liquid
is easily transmitted to the first compliance substrate, and the pressure variation
caused by the liquid introduced from the inlet is more easily accommodated by the
first compliance substrate.
[0014] In a desirable aspect of the invention, the first compliance substrate is a composite
member of a flexible film and a metallic member. According to this aspect, since the
first compliance substrate is a composite member of a flexible film and a metallic
member, the first compliance substrate itself may have rigidity.
[0015] In a desirable aspect of the invention, the first compliance substrate is a single
member containing no metallic member. According to this aspect, since the first compliance
substrate is a single member containing no metallic member, the first compliance substrate
itself may have no rigidity. In this aspect, since the first compliance substrate
is disposed in the first reservoir on the side opposite to the inlet, the first compliance
substrate can be formed separately from the inlet. Therefore, it is not necessary
to provide rigidity to the first compliance substrate itself by integrating the metallic
member which forms the inlet and the first compliance substrate as a component module.
Therefore, by setting the first compliance substrate as a single part, the number
of parts can be reduced.
[0016] In a desirable aspect of the invention, the first compliance substrate is disposed
between an opening of the second reservoir and an opening of the damper chamber that
face each other, fixed to the second case member, and is not fixed to the first case
member. According to this aspect, the first compliance substrate is disposed between
an opening of the second reservoir and an opening of the damper chamber that face
each other, fixed to the second case member, and is not fixed to the first case member.
Therefore, stress concentration by heat stress or the like generated between parts,
for example, can be alleviated as compared with a case in which the first compliance
substrate is fixed to both the first case member and the second case member.
[0017] A desirable aspect of the invention includes a case member in which the liquid reservoir
is formed. The case member includes a first case member in which the first reservoir
is formed, and a second case member in which the intermediate reservoir is formed.
The first case member and the second case member are stacked such that at least a
part of the first reservoir overlaps the second reservoir when seen in a plan view.
The second case member includes an expanded space that communicates with the first
reservoir on the first reservoir side and an accommodation space accommodating a driving
IC which drives the driving element on the side opposite to the first reservoir. The
expanded space penetrates so as to open on the accommodation space side. The first
compliance substrate is fixed to the second case member so as to seal an opening which
opens to the accommodation space side of the expanded space. According to this configuration,
since the first compliance substrate is fixed to the second case member so as to seal
the opening of the expanded space on the accommodation space side, a volume of the
first reservoir can be increased by the volume of the expanded space. Since the first
compliance substrate is disposed on the accommodation space side which accommodates
the driving IC, for example, the metal part can be brought into contact with the driving
IC when the first compliance substrate is constituted by a composite material of a
flexible film and a metallic member. Since heat of the driving IC can be transmitted
to the liquid via the metal part of the first compliance substrate by bringing the
metal part of the first compliance substrate into contact with the driving IC, heat
of the driving IC can be radiated.
[0018] In a desirable aspect of the invention, a third compliance substrate that seals an
opening which opens to the first reservoir side in the first case member. In this
configuration, the third compliance substrate is disposed in the first case member
in addition to the first compliance substrate in the second case member as the compliance
substrate of the first reservoir. Quick pressure variation due to introduction of
ink from an inlet is easily caused in the first reservoir. Therefore, quick pressure
variation in the first reservoir can be accommodated effectively with an increased
number of compliance substrates in the first reservoir as in this aspect.
[0019] A liquid ejection apparatus of the invention includes a transport mechanism that
transports a medium, and a liquid ejection head according to any one of the above
aspects that ejects a liquid onto the medium. According to the above aspect, since
the first compliance substrate is provided in the first reservoir on the inlet side
on the side opposite to the second reservoir, an area of an active part of the first
compliance substrate can be increased irrespective of the position and the size of
the inlet as compared with a case in which the compliance substrate is provided on
the same side as that of the inlet. Thus, according to this aspect, an absorption
effect of pressure variation caused by a liquid can be improved irrespective of the
position of the inlet. Further, since the first compliance substrate is disposed in
the first reservoir on the side opposite to the inlet, the first compliance substrate
can be disposed such that the liquid introduced from the inlet may hit the first compliance
substrate. Therefore, pressure of the liquid is transmitted to the first compliance
substrate more easily than a case in which the first compliance substrate is provided
on the same side as that of the inlet. Therefore, pressure variation caused by the
liquid introduced from the inlet is easily accommodated by the first compliance substrate.
Since the second compliance substrate is provided in the second reservoir disposed
on the individual channel side on the side opposite to the first reservoir, the second
compliance substrate is disposed at a position closer to the pressure chamber than
the first compliance substrate. Therefore, pressure variation of the pressure chamber
transmitted to the second reservoir via the individual channel is effectively accommodated
by the second compliance substrate. Therefore, according to this aspect, since pressure
variation caused by the liquid can be effectively accommodated, ejection stability
of the liquid from the nozzle can be improved.
BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Embodiments of the invention will now be described by way of example only with reference
to the accompanying drawings, wherein like numbers reference like elements.
Fig. 1 is a configuration diagram of a liquid ejection apparatus according to a first
embodiment of the present disclosure.
Fig. 2 is an exploded perspective view of a liquid ejection head.
Fig. 3 is a cross-sectional view of the liquid ejection head illustrated in Fig. 2
along line III-III.
Fig. 4 is a plan view of a case member illustrated in Fig. 2 seen in a Z direction.
Fig. 5 is a cross-sectional view of a liquid ejection head according to Comparative
Example.
Fig. 6 is a plan view of a case member according to Comparative Example seen in the
Z direction.
Fig. 7 is a cross-sectional view of a liquid ejection head according to a second embodiment.
Fig. 8 is a cross-sectional view of a liquid ejection head according to a third embodiment.
DESCRIPTION OF EXEMPLARY EMBODIMENTS
First Embodiment
[0021] Fig. 1 is a configuration diagram illustrating a liquid ejection apparatus 10 according
to a first embodiment of the invention. The liquid ejection apparatus 10 of the first
embodiment is an ink jet printing apparatus which ejects ink as an exemplary liquid
onto a medium 12. The medium 12 is typically printing paper, however, an arbitrary
printing target, such as a resin film or a textile, may be used as the medium 12.
As illustrated in Fig. 1, a liquid container 14 which stores ink is fixed to the liquid
ejection apparatus 10. For example, a cartridge removably attached to the liquid ejection
apparatus 10, a bag-like ink pack made of a flexible film, or an ink tank which can
be replenished with ink may be used as the liquid container 14. A plurality of types
of ink with different colors is stored in the liquid container 14.
[0022] As illustrated in Fig. 1, the liquid ejection apparatus 10 includes a control device
20, a transport mechanism 22, a moving mechanism 24, and a plurality of liquid ejection
heads 26. The control device 20 includes a processing circuit, such as a central processing
unit (CPU) or a field programmable gate array (FPGA), and a storage circuit, such
as semiconductor memory, and performs centralized control of elements of the liquid
ejection apparatus 10. The transport mechanism 22 transports the medium 12 in a Y
direction under the control of the control device 20.
[0023] The moving mechanism 24 causes a plurality of liquid ejection heads 26 to reciprocate
in an X direction under the control of the control device 20. The X direction crosses
(typically, perpendicularly) the Y direction in which the medium 12 is transported.
The moving mechanism 24 of the first embodiment includes a carriage 242 on which a
plurality of liquid ejection heads 26 is mounted and an endless belt 244 to which
the carriage 242 is fixed. It is also possible to mount the liquid container 14 on
the carriage 242 together with the liquid ejection heads 26.
[0024] Each of a plurality of liquid ejection heads 26 ejects the ink supplied from the
liquid container 14 onto the medium 12 from a plurality of nozzles (ejection openings)
under the control of the control device 20. A desirable image is formed on a surface
of the medium 12 when each liquid ejection head 26 ejects the ink onto the medium
12 while the medium 12 is transported by the transport mechanism 22 and the carriage
242 is made to reciprocate repetitively. Hereinafter, a direction orthogonal to an
X-Y plane (for example, a plane parallel to a surface of the medium 12) will be defined
as a Z direction. A direction in which the ink is ejected from each liquid ejection
head 26 (typically the vertical direction) corresponds to the Z direction.
[0025] Fig. 2 is an exploded perspective view of one arbitrary liquid ejection head 26.
Fig. 3 is a cross-sectional view along line III-III of Fig. 2. Fig. 4 is a plan view
of a case member 40 illustrated in Fig. 2 seen in the Z direction. As illustrated
in Fig. 2, the liquid ejection head 26 includes a plurality of nozzles N arranged
in the Y direction. A plurality of nozzles N of the first embodiment is separated
into a first line L1 and a second line L2. The positions at which the nozzles N are
arranged in the Y direction may differ between the first line L1 and the second line
L2 (that is, the nozzles N may be arranged in a zigzag or staggered pattern). However,
for ease of illustration, an example in which the nozzles N of the first line L1 and
the second line L2 are arranged in the same positions in the Y direction is illustrated
in Fig. 3. In the liquid ejection head 26 illustrated in Fig. 2, the elements related
to a plurality of nozzles N of the first line L1 and the elements related to a plurality
of nozzles N of the second line L2 are arranged to be substantially linearly symmetrical.
[0026] As illustrated in Figs. 2 and 3, the liquid ejection head 26 of the first embodiment
includes a channel substrate 32. The channel substrate 32 is a tabular member which
includes a first surface F1 and a bonding surface FA. The first surface F1 is a positive-side
surface in the Z direction (a surface on the side of the medium 12) and the bonding
surface FA is a surface on the side opposite to the first surface F1 (a negative side
in the Z direction). On the bonding surface FA of the channel substrate 32, a pressure
chamber substrate 34, a vibrating portion 36, a plurality of piezoelectric elements
37, a protection member 38, and a case member 40 are provided. On the first surface
F1, a nozzle plate 52 and a second compliance substrate 54 are provided. Each element
of the liquid ejection head 26 is a substantially tabular member which is long in
the Y direction as in the channel substrate 32. The members are joined to each other
by using an adhesive, for example. A direction in which the channel substrate 32,
the pressure chamber substrate 34, the protection member 38, and the nozzle plate
52 are stacked may be considered the Z direction.
[0027] The nozzle plate 52 is a tabular member in which a plurality of nozzles N is formed
and is attached on the first surface F1 of the channel substrate 32 by using an adhesive,
for example. Each nozzle N is a through hole through which the ink passes. The nozzle
plate 52 of the first embodiment is manufactured by processing a silicon (Si) monocrystal
substrate by using a semiconductor manufacturing technology (for example, etching).
However, publicly known materials and processes may be employed for the manufacture
of the nozzle plate 52.
[0028] The channel substrate 32 is a tabular member for forming an ink channel. As illustrated
in Figs. 2 and 3, a space constituting a second reservoir RA, which is a part of a
later-described liquid reservoir R, a plurality of supply channels (exemplary individual
channels) 322, and a plurality of communication channels 324 are formed in the channel
substrate 32 of the first embodiment for each of the first line L1 and the second
line L2. The second reservoir RA is a reservoir disposed on the side of the supply
channels 322 among other liquid reservoirs R and is formed in an elongated shape in
the Y direction when seen in plan view (that is, when seen in the Z direction). Each
of the supply channels 322 and the communication channels 324 is a through hole formed
for each nozzle N. A plurality of supply channels 322 is arranged in the Y direction
and a plurality of communication channels 324 is also arranged in the Y direction.
As illustrated in Fig. 3, the intermediate channel 326 disposed across a plurality
of supply channels 322 is formed on the first surface F1 of the channel substrate
32. The intermediate flow channel 326 connects the second reservoir RA and a plurality
of supply channels 322 to each other. The communication channel 324 communicates with
the nozzle N.
[0029] As illustrated in Figs. 2 and 3, the pressure chamber substrate 34 is a tabular member
in which a plurality of openings 342 arranged in the Y direction is formed for each
of the first line L1 and the second line L2. The pressure chamber substrate 34 is
attached on the bonding surface FA of the channel substrate 32 by using an adhesive,
for example. The opening 342 is an elongated through hole, one of which is formed
for every nozzle N in the X direction when seen in a plan view. The channel substrate
32 and the pressure chamber substrate 34 are manufactured by processing a silicon
(Si) monocrystal substrate by using a semiconductor manufacturing technology, for
example, as in the above-described nozzle plate 52. However, publicly known materials
and processes may be employed for the manufacture of the channel substrate 32 and
the pressure chamber substrate 34.
[0030] As illustrated in Figs. 2 and 3, a vibrating portion 36 is provided on the surface
of the pressure chamber substrate 34 on the side opposite to the channel substrate
32. The vibrating portion 36 of the first embodiment is a tabular member which vibrates
elastically (a vibrating plate). The pressure chamber substrate 34 and the vibrating
portion 36 may be integrated with each other by selectively removing a part of a tabular
member of a predetermined thickness in a thickness direction in an area corresponding
to the opening 342.
[0031] As is understood from Fig. 3, the bonding surface FA of the channel substrate 32
and the vibrating portion 36 face each other with a space inside of each opening 342
therebetween. A space between the bonding surface FA of the channel substrate 32 and
the vibrating portion 36 inside of the opening 342 functions as a pressure chamber
C for applying pressure to the ink with which the space is filled. The longitudinal
direction of the pressure chamber C corresponds to the X direction, and the width
direction of the pressure chamber C corresponds to the Y direction, for example. A
pressure chamber C is formed for each nozzle N. A plurality of pressure chambers C
is arranged in the Y direction for each of the first line L1 and the second line L2.
As is understood from Fig. 3, each pressure chamber C communicates with a respective
second reservoir RA via a respective supply channel 322 and a respective intermediate
flow channel 326, and communicates with a respective nozzle N via a respective communication
channel 324. It is also possible to add predetermined channel resistance by forming
a narrowed channel having a narrowed flow path width in the opening 342 or the intermediate
flow channel 326.
[0032] As illustrated in Figs. 2 and 3, a plurality of piezoelectric elements 37 corresponding
to different nozzles N is provided for each of the first line L1 and the second line
L2 on a surface of the vibrating portion 36 on the side opposite to the pressure chamber
C. The piezoelectric elements 37 are driving elements which deform upon receiving
a driving signal. A plurality of piezoelectric elements 37 is arranged in the Y direction
so as to correspond to the pressure chambers C. Each piezoelectric element 37 is a
layered product in which a piezoelectric member is disposed between mutually facing
electrodes. When the vibrating portion 36 is vibrated in accordance with deformation
of the piezoelectric element 37, a pressure fluctuation is caused in the pressure
chamber C, and the ink with which the pressure chamber C is filled passes through
the communication channel 324 and the nozzle N and is ejected.
[0033] The protection member 38 of Figs. 2 and 3 is a tabular member for protecting a plurality
of piezoelectric elements 37 and is provided on the surface of the vibrating portion
36 (or the surface of the pressure chamber substrate 34). The protection member 38
may be made of a non-specific material and by a non-specific process. The protection
member 38 may be formed by processing a silicon (Si) monocrystal substrate by using
a semiconductor manufacturing technology, for example, as in the channel substrate
32 or the pressure chamber substrate 34.
[0034] An accommodation space 382 which accommodates a plurality of piezoelectric elements
37 is formed on a surface of the protection member 38 on the side of the vibrating
portion 36 (hereinafter, a "bonding surface") for each of the first line L1 and the
second line L2. The accommodation space 382 is a space depressed from the bonding
surface and is long in the Y direction along the array of a plurality of piezoelectric
elements 37. A driving IC 62 is provided on a surface of the protection member 38
opposite to the side of the accommodation space 382 (hereinafter, a "mounting surface").
The driving IC 62 is a substantially rectangular IC chip on which a driving circuit
which drives each piezoelectric element 37 by generating and supplying a driving signal
under the control of the control device 20 is mounted. As illustrated in Fig. 3, at
least some of the piezoelectric elements 37 of the liquid ejection head 26 overlap
the driving IC 62 when seen in plan view. As illustrated in Fig. 3, the driving IC
62 overlaps both the piezoelectric elements 37 corresponding to the nozzles N of the
first line L1 and the piezoelectric elements 37 corresponding to the nozzles N of
the second line L2 when seen in plan view. That is, the driving IC 62 is disposed
across both the nozzles N of the first line L1 and the nozzles N of the second line
L2 in the X direction.
[0035] As illustrated in Fig. 2, a plurality of wires 388 connected to an input terminal
of the driving IC 62 is formed on the mounting surface of the protection member 38.
A plurality of wires 388 extends to a region E positioned at an end of the mounting
surface of the protection member 38 in the Y direction (that is, a direction in which
a plurality of piezoelectric elements 37 is arranged). A wiring member 64 is connected
to the region E of the mounting surface. The wiring member 64 is a mounting component
in which a plurality of wires (not illustrated) which electrically connects the control
device 20 and the driving IC 62 to each other is formed. For example, a flexible wiring
substrate, such as a flexible printed circuit (FPC) or a flexible flat cable (FFC),
is suitably employed as the wiring member 64. As described above, the protection member
38 of the first embodiment functions also as a wiring substrate in which the wires
(384 and 388) which transmit the driving signals are formed. A wiring substrate to
be used for mounting of the driving IC 62 or the formation of the wires may be provided
separately from the protection member 38.
[0036] A case member (a case portion) 40 in Figs. 2 and 3 is constituted by a first case
member (an upper case member) 402 and a second case member (a lower case member) 404
which are stacked together. The first case member 402 is disposed on a negative side
(an upper side) in the Z direction and the second case member 404 is disposed on a
positive side (a lower side) in the Z direction. The first case member 402 and the
second case member 404 are joined to each other by using an adhesive. The case member
40 is a housing for storing the ink to be supplied to a plurality of pressure chambers
C (and a plurality of nozzles N). A surface of the second case member 404 on the positive
side in the Z direction (hereinafter, a "bonding surface") FB is fixed to the bonding
surface FA of the channel substrate 32 by using an adhesive, for example. As illustrated
in Figs. 2 and 3, a groove-shaped recess 42 extending in the Y direction is formed
on the bonding surface FB of the second case member 404. The protection member 38
and the driving IC 62 are contained in an accommodation space inside the recess 42.
The wiring member 64 joined to the region E of the protection member 38 extends in
the Y direction so as to pass through the inside of the recess 42.
[0037] The case member 40 of the first embodiment is made of a material different from that
of the channel substrate 32 and the pressure chamber substrate 34. For example, the
case member 40 may be made of an injection molded resin material. However, publicly
known materials and processes may be employed for the manufacture of the case member
40. For example, synthetic fiber and resin materials may be desirably used as the
material of the case member 40.
[0038] As illustrated in Figs. 3 and 4, in the first embodiment, a space which constitutes
a first reservoir RB is formed in the first case member 402 for each of the first
line L1 and the second line L2, and a space which constitutes an intermediate reservoir
RC is formed in the second case member 404. The first reservoir RB of the first case
member 402 and the second reservoir RA of the channel substrate 32 communicate with
each other via the intermediate reservoir RC of the second case member 404. The space
constituted by the second reservoir RA, the first reservoir RB, and the intermediate
reservoir RC functions as a liquid reservoir (a reservoir) R which stores ink to be
supplied to a plurality of pressure chambers C. The liquid reservoir R is a common
liquid chamber across a plurality of nozzles N. An inlet 43 for introducing ink supplied
from the liquid container 14 into the liquid reservoir R is formed on the surface
FC of the first case member 402 on the side opposite to the channel substrate 32 for
each of the first line L1 and the second line L2. The surface of the second case member
404 on the side opposite to the channel substrate 32 is defined as a second surface
F2.
[0039] As illustrated in Fig. 3 and Fig. 4, the first reservoir RB of the first case member
402 is a space which is long in the Y direction. The first reservoir RB communicates
with the inlet 43. The intermediate reservoir RC of the second case member 404 is
a space which is long in the Z direction. The intermediate reservoir RC is positioned
on a downstream side of the first reservoir RB, and communicates with the second reservoir
RA of the channel substrate 32. When seen from a positive side in the Z direction,
the recess 42 which accommodates the protection member 38 and the driving IC 62 is
positioned between the intermediate reservoir RC corresponding to the first line L1
and the intermediate reservoir RC corresponding to the second line L2. Therefore,
the intermediate reservoir RC is positioned on the side (a positive side or a negative
side in the X direction) of the piezoelectric element 37, the protection member 38,
and the driving IC 62. As described above, in the first embodiment, the liquid reservoir
R includes the first reservoir RB and the intermediate reservoir RC. Therefore, compared
with a configuration without either the first reservoir RB or the intermediate reservoir
RC, it is possible to increase the size of the liquid reservoir R.
[0040] The ink supplied to the inlet 43 along the positive side in the Z direction from
the liquid container 14 flows inside the first reservoir RB of the liquid reservoir
R in the direction substantially parallel to an X-Y plane (for example, horizontal
direction, X direction) depicted by broken line arrow in Fig. 3 and flows into the
intermediate reservoir RC then flows to the positive side (for example, to a lower
side in the vertical direction) in the Z direction inside the intermediate reservoir
RC and reaches the second reservoir RA of the channel substrate 32. The ink stored
in the liquid reservoir R flows in the X direction in the intermediate channel 326,
branches from the intermediate channel 326 into a plurality of supply channels 322,
flows toward the negative side of the Z direction, and is supplied to each pressure
chamber C in parallel to fill each pressure chamber C. The ink with which the pressure
chamber C is filled flows in the Z direction in the communication channel 324 and
is ejected through the nozzles N.
[0041] Each of the liquid ejection heads 26 of the first embodiment includes the first surface
F1 and the second surface F2 as described above. Each piezoelectric element 37, the
protection member 38, and the driving IC 62 are disposed between the first surface
F1 and the second surface F2. The first surface F1 is positioned on the piezoelectric
element 37 side when seen from the driving IC 62, and the second surface F2 is positioned
on the side opposite to the piezoelectric element 37 when seen from the driving IC
62. The above-described inlet 43 is formed above the second surface F2.
[0042] As illustrated in Fig. 2, the second compliance substrate 54 is provided on the first
surface F1 of the channel substrate 32. The second compliance substrate 54 is a flexible
film which accommodates pressure variation of the ink in the liquid reservoir R. As
illustrated in Fig. 3, the second compliance substrate 54 is disposed on the first
surface F1 of the channel substrate 32, and constitutes a wall surface (specifically,
a bottom surface of the second reservoir RA) of the liquid reservoir R so as to seal
the opening which opens to the first surface F1 of the channel substrate 32 by the
second reservoir RA, the intermediate flow channel 326, and a plurality of supply
channels 322 of the channel substrate 32. Since the second compliance substrate 54
of such a configuration is disposed at a position close to the pressure chamber C,
the second compliance substrate 54 can effectively accommodate pressure variation
of the pressure chamber C transmitted to the second reservoir RA via the supply channels
322, which are individual channels.
[0043] The first compliance substrate 46 is provided on the second surface F2 of the second
case member 404. The first compliance substrate 46 is a flexible film which accommodates
pressure variation of the ink in the liquid reservoir R as in the second compliance
substrate 54. As illustrated in Fig. 3, an opening which constitutes a damper chamber
44 is provided in the second case member 404 on the side opposite to the first reservoir
RB via the first compliance substrate 46. The first compliance substrate 46 is provided
on the second surface F2 and constitutes a wall surface (specifically, a bottom surface
of the first reservoir RB) of the liquid reservoir R so as to seal the opening of
the damper chamber 44. According to this configuration, with the pressure in the direction
in which the ink flows into the first reservoir RB from the inlet 43, the first compliance
substrate 46 can be bent toward the damper chamber 44. Therefore, the pressure variation
of the ink which flows into the first reservoir RB from the inlet 43 can be controlled
effectively. Since it is easy to provide a sufficient area for the second surface
F2, according to the first embodiment in which the first compliance substrate 46 is
disposed on the second surface F2 of the channel substrate 32, pressure variation
in the liquid reservoir R can be effectively accommodated as compared with the configuration
in which only the second compliance substrate 54 is provided.
[0044] As illustrated in Fig. 3, at least a part of the first reservoir RB overlaps the
second reservoir RA when seen in plan view (that is, when seen in the Z direction).
Further, at least a part of the first compliance substrate 46 overlaps the second
compliance substrate 54 when seen in plan view. The pressure chamber C overlaps both
the first reservoir RB and the first compliance substrate 46 when seen in plan view.
It is also considered that the first reservoir RB protrudes from the intermediate
reservoir RC in the X direction so as to overlap the piezoelectric element 37 and
the driving IC 62, and the first compliance substrate 46 is provided in the protruding
portion. Therefore, since each constituent element of the liquid ejection head 26
is made to overlap as much as possible when seen in plan view, the size of the liquid
ejection head 26 can be reduced as much as possible.
[0045] Since the first compliance substrate 46 of the present embodiment is provided in
the first reservoir RB on the second reservoir RA side which is the side opposite
to that of the inlet 43, an area of an active part in which the first compliance substrate
46 deforms can be increased irrespective of the position and the size of the inlet
43 as compared with the case in which the compliance substrate 46 is provided on the
same side as that of the inlet 43.
[0046] Here, an operation and effect of the present embodiment will be described in comparison
with Comparative Example. Fig. 5 is a cross-sectional view of a liquid ejection head
26' according to Comparative Example of the present embodiment and corresponds to
Fig. 3. Fig. 6 is a plan view of a case member 40' of Comparative Example illustrated
in Fig. 5 seen in the Z direction. As illustrated in Figs. 5 and 6, in the liquid
ejection head 26' of Comparative Example, a compliance substrate 46' is provided on
the same side as that of the inlet 43. That is, in the liquid ejection head 26' of
Comparative Example, an inlet 43 and a first reservoir RB are provided in the case
member 40', and the compliance substrate 46' is provided on a second surface F2' on
the same side as the inlet 43 in the case member 40'. In the configuration of the
Comparative Example, since the compliance substrate 46' is provided on the same side
as the inlet 43, an active part of the compliance substrate 46' needs to be disposed
so as not to interfere with the inlet 43 so that a metal part of the inlet 43 is not
deformed. Therefore, an area and a form of the active part of the compliance substrate
46' will be limited by the position and the size of the inlet 43.
[0047] In the liquid ejection head 26 of the present embodiment, the case member 40 is formed
by the first case member 402 and the second case member 404, and the inlet 43 is provided
on the side of the first case member 402. According to this configuration, the first
reservoir RB and the compliance substrate 46 can be provided on the side of the first
case member 402 separately from the inlet 43. Therefore, in the present embodiment,
an area of the active part of the first compliance substrate 46 can be increased irrespective
of the position and the size of the inlet 43.
[0048] A portion depicted by the dotted line in Fig. 4 corresponds to the first compliance
substrate 46 of the present embodiment, and a portion depicted by the solid line inside
thereof is equivalent to the active part P. Similarly, a portion depicted by the dotted
line in Fig. 6 corresponds to the first compliance substrate 46' of Comparative Example,
and a portion depicted by the solid line inside thereof is equivalent to an active
part P'. In the first compliance substrate 46' of Comparative Example of Fig. 6, a
portion in which the inlet 43 is disposed cannot function as an active part. On the
contrary, since there is no portion in which the inlet 43 is disposed in the first
compliance substrate 46 of the present embodiment of Fig. 4, the active part P of
the first compliance substrate 46 is larger than the active part P' of Comparative
Example of Fig. 6. Therefore, according to the first compliance substrate 46 of the
present embodiment, an absorption effect of the pressure variation by the ink can
be improved irrespective of the position of the inlet 43.
[0049] In the configuration of the present embodiment illustrated in Fig. 3, since the first
compliance substrate 46 is disposed in the first reservoir RB on the side opposite
to the inlet 43, the first compliance substrate 46 can be disposed such that the ink
introduced from the inlet 43 may hit the first compliance substrate 46. Therefore,
the pressure of the ink is more easily transmitted to the first compliance substrate
46 than in a case in which the first compliance substrate 46' is disposed on the same
side as the inlet 43 like the Comparative Example illustrated in Fig. 5. Therefore,
pressure variation caused by the ink introduced from the inlet 43 is easily accommodated
by the first compliance substrate 46.
[0050] Next, a relationship between the first compliance substrate 46 and the second compliance
substrate 54 will be described. In the present embodiment, in the second reservoir
RA disposed on the supply channel 322 side which is an individual channel, the second
compliance substrate 54 is provided on the side opposite to the first reservoir RB.
Therefore, the second compliance substrate 54 is disposed at a position closer to
the pressure chamber C than the first compliance substrate 46. Therefore, pressure
variation of the pressure chamber C transmitted to the second reservoir RA via the
supply channel 322 is effectively accommodated by the second compliance substrate
54.
[0051] According to the present embodiment, the pressure variation caused by introduction
of the ink from the inlet 43 is easily accommodated mainly by the first compliance
substrate 46, and the pressure variation of the pressure chamber C is easily accommodated
mainly by the second compliance substrate 54. For example, by setting the Young's
modulus of the second compliance substrate 54 to be equal to or smaller than the Young's
modulus of the first compliance substrate 46, the second compliance substrate 54 can
be made softer (less rigid) than the first compliance substrate 46. In this manner,
the pressure variation of the pressure chamber C which is minuter than the pressure
variation caused by introduction of the ink from the inlet 43 can be more easily accommodated
by the second compliance substrate 54.
[0052] Regarding the first compliance substrate 46, pressure variation (pressure loss) caused
by a quick movement of the ink in the first reservoir RB introduced from the inlet
43 is accommodatable by the active part of the first compliance substrate 46 which
moves greatly and changes channel volume. Therefore, the first compliance substrate
46 is desirably made of a material and in a size to be bent more than the second compliance
substrate 54. The second compliance substrate 54 can be made softer than the first
compliance substrate 46 by setting a thickness of the second compliance substrate
54 to be equal to or smaller than a thickness of the first compliance substrate 46.
Also in this manner, the pressure variation of the pressure chamber C may be easily
accommodated by the second compliance substrate 54.
[0053] As described above, since the two compliance substrates are disposed in the present
embodiment, the optimal material and size may be selected for each of the compliance
substrates. In addition to those described above, materials having metal evaporated
film to suppress transmission of moisture content may be employed as the material
of the first compliance substrate, for example. Since the pressure variation of the
liquid reservoir R may become larger in a certain pressure range in a case in which
printing is performed from a non-printing condition to the maximum printing speed,
for example, the material of the first compliance substrate 46 may have a different
bending amount depending on the pressure range.
[0054] In the present embodiment, the case member 40 is divided into the first case member
402 and the second case member 404, and the first reservoir RB is formed in the first
case member 402 which is disposed on the upper side. Therefore, by forming the first
case member 402 by a material which is easy to process, the shape of a ceiling of
the first reservoir RB can be easily changed. Dischargeability of air bubbles which
easily move upward can be improved by forming the shape of a corner Q of the ceiling
of the first reservoir RB into a curved surface shape along a flow of the ink, and
the like, as illustrated in Fig. 3, for example. Since a flow velocity of ink necessary
for the discharge of air bubbles can be lowered by improving dischargeability of air
bubbles, waste of ink can be reduced. Since the first case member 402 and the second
case member 404 are divided, a first reservoir RB of a different shape or a first
reservoir RB having different functions (a function for circulating the ink, and a
function for removing air bubbles), for example, may be used easily by simply replacing
the first case member 402.
[0055] In the present embodiment, since the first compliance substrate 46 is provided between
the first case member 402 and the second case member 404, the active part P of the
first compliance substrate 46 is not exposed to the outside of the first case member
402 and the second case member 404. Therefore, as compared with a case in which the
first compliance substrate 46 is exposed to the outside of the first case member 402
and the second case member 404, evaporation of moisture content can be suppressed,
and it is easy to take measures to suppress evaporation of moisture content. As measures
to suppress evaporation of moisture content, for example, it is also possible to seal
the first compliance substrate 46 after providing a long air channel, such as a bellows,
for suppressing internal pressure fluctuation caused by temperature change.
[0056] The length of the first compliance substrate 46 is longer than an opening width of
the inlet 43 not only in the Y direction (the longitudinal direction) but also in
the X direction (the width direction). Therefore, since the area of the active part
becomes larger than the opening width of the inlet 43, deformation of the active part
can be made larger. Therefore, pressure variation of the ink is more easily accommodated
by the first compliance substrate 46. Since the first compliance substrate 46 overlaps
the inlet 43 when seen in a plan view, the ink introduced from the inlet 43 easily
hits the first compliance substrate 46. Therefore, pressure of the ink is easily transmitted
to the first compliance substrate 46, and the pressure variation caused by the ink
introduced from the inlet 43 is more easily accommodated by the first compliance substrate
46.
[0057] Since the first compliance substrate 46 of the present embodiment is provided between
the first case member 402 and the second case member 404, the first compliance substrate
46 can be formed by a single member containing no metal, such as a flexible film,
like film. The first compliance substrate 46 may be formed by a member which contains
a metal evaporated film as a flexible film. Although a case in which two openings
which constitute two damper chambers 44 are sealed by separate first compliance substrates
46, respectively, is described in the present embodiment, the invention it is not
limited to the same, and two openings which constitute the damper chambers 44 may
be sealed by a single first compliance substrate 46. In the present embodiment, since
the first compliance substrate 46 is disposed in the first reservoir RB on the side
opposite to the inlet 43, the first compliance substrate 46 can be formed separately
from the inlet 43. Therefore, it is not necessary to provide rigidity to the first
compliance substrate 46 itself by integrating the metallic member which forms the
inlet 43 and the first compliance substrate 46 as a component module. Therefore, by
setting the first compliance substrate 46 as a single part, the number of parts can
be reduced. However, the first compliance substrate 46 itself may have rigidity as
a composite member with the flexible film and the metallic member.
[0058] The first compliance substrate 46 may be fixed to both the first case member 402
and the second case member 404, or only to one of them. For example, the first compliance
substrate 46 may be fixed to the second case member 404, and may not be fixed to the
first case member 402. According to this configuration, stress concentration by heat
stress or the like generated between parts, for example, can be alleviated as compared
with a case in which the first compliance substrate 46 is fixed to both the first
case member 402 and the second case member 404.
Second Embodiment
[0059] A second embodiment of the invention will be described. In each form described below,
elements having the same effects and functions as those of the first embodiment are
denoted by the same reference numerals used in the description of the first embodiment,
and detailed description will be omitted. In the first embodiment, the first compliance
substrate 46 is disposed between the first case member 402 and the second case member
404. In the second embodiment, a first compliance substrate 46 is disposed in another
position. Fig. 7 is a cross-sectional view of a liquid ejection head 26 of the second
embodiment and corresponds to Fig. 3. A second case member 404 of Fig. 7 includes
an expanded space 45 which communicates with a first reservoir RB on a first reservoir
RB side. The second case member 404 of Fig. 7 includes an accommodation space which
is constituted by a recess 42 accommodating a driving IC on the side opposite to the
first reservoir RB as in Fig. 3. The expanded space 45 penetrates so as to open to
the accommodation space (the recess 42). The first compliance substrate 46 of Fig.
7 is fixed to the second case member 404 so as to seal an opening of the expanded
space 45 which opens to the accommodation space side.
[0060] According to the configuration of the second embodiment, since the first compliance
substrate 46 is fixed to the second case member 404 from the inside of the recess
42 so as to seal the opening of the expanded space 45 on the accommodation space side,
a volume of the first reservoir RB can be increased by the volume of the expanded
space 45.
Third Embodiment
[0061] A third embodiment of the invention will be described. In the third embodiment, a
plurality of first compliance substrates 46 is provided in a first reservoir RB. Fig.
8 is a cross-sectional view of a liquid ejection head 26 of a third embodiment and
corresponds to Fig. 7. Fig. 8 illustrates a liquid ejection head 26 in which a third
compliance substrate 47 which seals an opening (a damper chamber) 472 which opens
to the first reservoir RB side is also provided in a first case member 402, other
than a first compliance substrate 46 illustrated in Fig. 7.
[0062] According to the configuration of the third embodiment, the third compliance substrate
47 as the compliance substrate of the first reservoir RB is disposed not only in the
first compliance substrate 46 of the second case member 404 but also in the first
case member 402. Quick pressure variation due to introduction of ink from an inlet
43 is easily caused in the first reservoir RB. Therefore, quick pressure variation
in the first reservoir RB can be accommodated effectively with an increased number
of compliance substrates in the first reservoir RB as in the third embodiment. The
compliance substrates in the first reservoir RB are not limited to the first compliance
substrate 46 and the third compliance substrate 47 described in the third embodiment,
and further compliance substrates may be provided. The first embodiment can also be
modified in the same way as the second embodiment.
Alternative Embodiments
[0063] The aspects and embodiments described above may be modified in various ways. Aspects
of specific alternative embodiments will be described below. Two or more aspects arbitrarily
selected from the following examples and above-described aspects may be merged suitably
in a range without contradiction.
- (1) In the embodiments described above, a serial head in which the carriage 242 on
which the liquid ejection heads 26 are mounted is made to repetitively reciprocate
in the X direction is described. However, the invention is applicable also to a linear
head in which the liquid ejection heads 26 are arranged over the entire width of the
medium 12.
- (2) In the embodiments described above, a piezoelectric system liquid ejection head
26 using a piezoelectric element which applies mechanical vibration to a pressure
chamber is described. However, a thermal system liquid ejection head using a heating
element which generates air bubbles inside a pressure chamber may also be employed.
- (3) The liquid ejection apparatus 10 described in each of the above-described embodiments
is applicable to an apparatus dedicated for printing, and other various apparatuses,
such as a facsimile machine and a copy machine. However, application of the liquid
ejection apparatus 10 of the invention is not limited to printing. For example, the
liquid ejection apparatus which ejects a solution of a coloring material is used as
an apparatus for manufacturing a color filter of a liquid crystal display device,
an organic electro luminescence (EL) display, a surface emitting display (FED), and
so forth. A liquid ejection apparatus which ejects a solution of a conductive material
may be used as an apparatus for manufacturing a wire and an electrode of a wiring
substrate. Further, the liquid ejection apparatus is used as a chip manufacturing
apparatus which ejects a solution of bioorganic substances as a kind of the liquid.
1. A liquid ejection head (26), comprising:
a driving element (37) configured to change a pressure of a pressure chamber (C) and
cause a liquid to be ejected from a nozzle (N);
an individual channel (322) that communicates with the pressure chamber; and
a liquid reservoir (R) configured to supply, via the individual channel, the liquid
introduced from an inlet (43) to the pressure chamber, wherein
the liquid reservoir includes
a first reservoir (RB) disposed on the inlet side,
a second reservoir (RA) disposed on the individual channel side, and
an intermediate reservoir (RC) that communicates with the first reservoir and the
second reservoir,
at least a part of the first reservoir overlaps the second reservoir when seen in
plan view,
a first compliance substrate (46) is provided in the first reservoir on the second
reservoir side on the side opposite to the inlet, and
a second compliance substrate (54) is provided in the second reservoir on the side
opposite to the first reservoir.
2. The liquid ejection head according to Claim 1, wherein at least a part of the first
compliance substrate overlaps the second compliance substrate when seen in plan view.
3. The liquid ejection head according to Claim 1 or Claim 2, wherein the Young's modulus
of the second compliance substrate is equal to or lower than the Young's modulus of
the first compliance substrate.
4. The liquid ejection head according to any one of the preceding claims, wherein a thickness
of the second compliance substrate is equal to or smaller than a thickness of the
first compliance substrate.
5. The liquid ejection head according to any one of the preceding claims, wherein the
pressure chamber (C) overlaps both the first reservoir (RB) and the first compliance
substrate (46) when seen in plan view.
6. The liquid ejection head according to any one of the preceding claims, further comprising
a driving IC (62) configured to drive the driving element, wherein the driving IC
overlaps both the pressure chamber (C) and the first compliance substrate (46) when
seen in plan view.
7. The liquid ejection head according to any one of the preceding claims, further comprising
a case member (40) in which the liquid reservoir is formed, wherein
the case member includes
a first case member (402) in which the first reservoir (RB) is formed, and
a second case member (404) in which the intermediate reservoir (RC) is formed,
the first case member and the second case member are stacked such that at least a
part of the first reservoir overlaps the second reservoir when seen in plan view,
and
the first compliance substrate is provided between the first case member and the second
case member.
8. The liquid ejection head according to Claim 7, wherein a damper chamber (44) is provided
in the second case member (404) on the opposite side of the first compliance substrate
to the first reservoir.
9. The liquid ejection head according to Claim 8, wherein the first compliance substrate
is disposed between an opening of the second reservoir (RB) and an opening of the
damper chamber (44) that face each other, fixed to the second case member (404), and
is not fixed to the first case member (402).
10. The liquid ejection head according to any one of claims 1 to 6, further comprising
a case member (40) in which the liquid reservoir is formed, wherein
the case member includes
a first case member (402) in which the first reservoir (RB) is formed, and
a second case member (404) in which the intermediate reservoir (RC) is formed,
the first case member and the second case member are stacked such that at least a
part of the first reservoir overlaps the second reservoir when seen in plan view,
the second case member includes an expanded space (45) that communicates with the
first reservoir on the first reservoir side and an accommodation space (42) accommodating
a driving IC (62) which drives the driving element on the side opposite to the first
reservoir,
the expanded space extends so as to open on the accommodation space side, and
the first compliance substrate (46) is fixed to the second case member so as to seal
an opening which opens to the accommodation space side of the expanded space.
11. The liquid ejection head according to any one of the preceding claims, wherein the
length of an active part (P) of the first compliance substrate (46) which is to be
deformed is longer than an opening width of the inlet (43).
12. The liquid ejection head according to Claim 11, wherein the first compliance substrate
overlaps the inlet when seen in plan view.
13. The liquid ejection head according to any one of the preceding claims, wherein the
first compliance substrate is a composite of a flexible film and a metallic member.
14. The liquid ejection head according to any one of claims 1 to 12, wherein the first
compliance substrate is a single member containing no metallic member.
15. The liquid ejection head according to any one of the preceding claims, further comprising
a third compliance substrate (47) that seals an opening (472) which opens to the first
reservoir side in the first case member.
16. A liquid ejection apparatus (10), comprising:
a transport mechanism (22) configured to transport a medium (12); and
a liquid ejection head according to any one of the preceding claims configured eject
a liquid onto the medium.