(19)

(11)

EP 3 402 676 A1

(12)

(43) Date of publication: 21.11.2018 Bulletin 2018/47 (21) Application number: 17738950.9 (22) Date of filing: 12.01.2017

(51) International Patent Classification (IPC):  B32B 37/02(2006.01) H01L 21/67(2006.01) B32B 37/26(2006.01) (86) International application number: PCT/US2017/013216 (87) International publication number: WO 2017/123780 (20.07.2017 Gazette 2017/29)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 15.01.2016 US 201662279143 P (71) Applicant: Uniqarta, Inc. Cambridge, Massachusetts 02138 (US)	(72) Inventors: MARINOV, Val Fargo North Dakota 58102 (US) ATANASOV, Yuriy 1415 Sofia (BG) (74) Representative: Conroy, John  Fish & Richardson P.C. Highlight Business Towers Mies-van-der-Rohe-Straße 8 80807 München 80807 München (DE)