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EP 3 436 617 A1

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(43) Date of publication: 06.02.2019 Bulletin 2019/06 (21) Application number: 17715978.7 (22) Date of filing: 29.03.2017

(51) International Patent Classification (IPC):  C23C 10/06(2006.01) C23C 10/36(2006.01) G21F 1/06(2006.01) G21F 1/12(2006.01) C23C 10/08(2006.01) C23C 10/44(2006.01) G21F 1/08(2006.01) C23C 10/34(2006.01) (86) International application number: PCT/GB2017/050879 (87) International publication number: WO 2017/168147 (05.10.2017 Gazette 2017/40)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 30.03.2016 GB 201605361 (71) Applicant: Imperial Innovations Limited London SW7 2PG (GB)	(72) Inventors: HUMPHRY-BAKER, Samuel A. London SW7 2AZ (GB) LEE, William E. London SW7 2AZ (GB) (74) Representative: Talbot-Ponsonby, Daniel Frederick  Marks & Clerk LLP Fletcher House Heatley Road The Oxford Science Park Oxford OX4 4GE Oxford OX4 4GE (GB)