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EP 3 437 129 A1

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(43) Date of publication: 06.02.2019 Bulletin 2019/06 (21) Application number: 16897295.8 (22) Date of filing: 30.03.2016

(51) International Patent Classification (IPC):  H01L 23/48(2006.01) H01L 23/485(2006.01) H01L 23/498(2006.01) H01L 23/488(2006.01) (86) International application number: PCT/US2016/024827 (87) International publication number: WO 2017/171738 (05.10.2017 Gazette 2017/40)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (71) Applicant: INTEL Corporation Santa Clara, CA 95054 (US)	(72) Inventors: STARKSTON, Robert Phoenix, Arizona 85048 (US) SANKMAN, Robert L. Phoenix, Arizona 85044 (US) MOKLER, Scott M. Hillsboro, Oregon 97124 (US) STAMEY, Richard Christopher Portland, Oregon 97229 (US) ALUR, Amruthavalli Pallavi Tempe, Arizona 85284 (US) (74) Representative: 2SPL Patentanwälte PartG mbB  Postfach 15 17 23 80050 München 80050 München (DE)