(19)
(11) EP 3 440 027 A1

(12)

(43) Date of publication:
13.02.2019 Bulletin 2019/07

(21) Application number: 17779601.8

(22) Date of filing: 03.04.2017
(51) International Patent Classification (IPC): 
C03C 25/68(2006.01)
 C23F 1/00(2006.01)
(86) International application number:
PCT/US2017/025768
(87) International publication number:
WO 2017/176641 (12.10.2017 Gazette 2017/41)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 05.04.2016 US 201662318574 P

(71) Applicant: Veeco Precision Surface Processing LLC
Holsham, PA 19044 (US)

(72) Inventors:
  • MAUER, Laura
    South Kent CT 06785 (US)
  • TADDEI, John
    Horsham PA 19044 (US)
  • SWALLOW, James
    Horsham PA 19044 (US)
  • GOLBERG, David
    Horsham PA 19044 (US)
  • ZWIRNMANN, Eric, Kurt
    Horsham PA 19044 (US)

(74) Representative: Studio Torta S.p.A. 
Via Viotti, 9
10121 Torino
10121 Torino (IT)

   


(54) AN APPARATUS AND METHOD TO CONTROL ETCH RATE THROUGH ADAPTIVE SPIKING OF CHEMISTRY