(19)
(11) EP 3 452 630 A1

(12)

(43) Date of publication:
13.03.2019 Bulletin 2019/11

(21) Application number: 17792561.7

(22) Date of filing: 05.05.2017
(51) International Patent Classification (IPC): 
C23C 14/06(2006.01)
C23C 14/35(2006.01)
H01P 3/00(2006.01)
H01L 31/00(2006.01)
 C23C 14/22(2006.01)
C23C 14/34(2006.01)
G01N 33/483(2006.01)
(86) International application number:
PCT/FI2017/050350
(87) International publication number:
WO 2017/191370 (09.11.2017 Gazette 2017/45)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 06.05.2016 FI 20160122

(71) Applicant: Aalto University Foundation SR
00076 Aalto (FI)

(72) Inventors:
  • ETULA, Jarkko
    00320 Helsinki (FI)
  • IYER, Ajai
    02770 Espoo (FI)
  • KOSKINEN, Jari
    02940 Espoo (FI)

(74) Representative: Berggren Oy, Tampere 
Visiokatu 1
33720 Tampere
33720 Tampere (FI)

   


(54) METHOD FOR CO-DEPOSITING DETONATION NANODIAMONDS AND DIAMOND-LIKE CARBON ONTO A SUBSTRATE AND COMPOSITE FILMS COMPRISING DETONATION NANODIAMONDS AND DIAMOND-LIKE CARBON