(19)
(11) EP 3 455 873 A1

(12)

(43) Date of publication:
20.03.2019 Bulletin 2019/12

(21) Application number: 17719848.8

(22) Date of filing: 28.04.2017
(51) International Patent Classification (IPC): 
H01J 49/38(2006.01)
H01J 49/42(2006.01)
 H01J 49/02(2006.01)
(86) International application number:
PCT/EP2017/060204
(87) International publication number:
WO 2017/194333 (16.11.2017 Gazette 2017/46)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 10.05.2016 DE 102016208009

(71) Applicant: Carl Zeiss SMT GmbH
73447 Oberkochen (DE)

(72) Inventors:
  • ALIMAN, Michel
    73447 Oberkochen (DE)
  • BUTZMANN, Stefan
    58579 Schalksmühle (DE)
  • BROCKHAUS, Albrecht
    40724 Hilden (DE)
  • SCHMIDT, Michael
    42369 Wuppertal (DE)
  • CHUNG, Hin Yiu Anthony
    89075 Ulm (DE)
  • LAUE, Alexander
    89522 Heidenheim (DE)

(74) Representative: Kohler Schmid Möbus Patentanwälte 
Partnerschaftsgesellschaft mbB Gropiusplatz 10
70563 Stuttgart
70563 Stuttgart (DE)

   


(54) APPARATUS AND METHOD FOR DETECTING IONS