(19)

(11)

EP 3 465 737 A2

(12)

(88) Date of publication A3: 17.11.2016 (43) Date of publication: 10.04.2019 Bulletin 2019/15 (21) Application number: 16738363.7 (22) Date of filing: 27.05.2016

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) H01L 29/20(2006.01) H01L 29/06(2006.01) (86) International application number: PCT/EP2016/062049 (87) International publication number: WO 2016/162576 (13.10.2016 Gazette 2016/41)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (71) Applicant: Wernersson, Lars-Erik 222 70 Lund (SE)	(72) Inventors: SVENSSON, Johannes 224 71 Lund (SE) DEY, Anil Portland, OR 97229 (US) (74) Representative: AWA Sweden AB  P.O. Box 5117 200 71 Malmö 200 71 Malmö (SE)